In the first two books of the series Fundamental Aspects of Plasma Chemical Physics, we
have discussed thermodynamics 1 and transport 2 of thermal plasmas characterized by …

Comparative studies of capacitively coupled radio-frequency discharges in helium and
argon at pressures between 10 and 80 Pa are presented applying two different fluid …

Non-equilibrium inductively coupled plasmas (ICPs) operating in hydrogen are of significant
interest for applications including large-area materials processing. Increasing control of …

Abstract A PIC-MCC/fluid hybrid model was employed to study a parallel-plate capacitively
coupled radio-frequency discharge in hydrogen, under the application of a dc bias voltage …

The semi-implicit leapfrog time-discretization is a workhorse algorithm for initial-value MHD
codes to bridge between vastly separated time scales. Inclusion of atomic interactions with …

Abstract Particle-in-cell/Monte Carlo collision simulations considering one space and three
velocity coordinates are applied to analyse the impact of surface properties on plasma …

The combined effects of the variation of hydrogen pressure (40–400 mTorr) and exciting
frequency (13.56–50 MHz) on the electron energy probability function (EEPF) and other …

Hydrogen is the main component of many feeding mixtures used for plasma processing.
Despite this, the physics and chemistries of the parallel plate, capacitively coupled, radio …

The dynamics of electrons submitted to voltage pulses in a thin semiconductor layer is
investigated using a kinetic approach based on the solution of the electron Boltzmann …

A comparative study of capacitively coupled radio frequency discharges was conducted
using 2-D particle-in-cell simulation (PIC) and 2-D fluid plasma simulation. The selected …