Review on the modeling of electrostatic MEMS

WC Chuang, HL Lee, PZ Chang, YC Hu - Sensors, 2010 - mdpi.com
Electrostatic-driven microelectromechanical systems devices, in most cases, consist of
couplings of such energy domains as electromechanics, optical electricity, thermoelectricity …

A review on RF micro-electro-mechanical-systems (MEMS) switch for radio frequency applications

Kurmendra, R Kumar - Microsystem Technologies, 2021 - Springer
This paper is designed to review the MEMS switch by considering key aspects on the basis
of mechanical structure, actuation methods, and types of contact and circuit configurations …

On the nonlinear resonances and dynamic pull-in of electrostatically actuated resonators

FM Alsaleem, MI Younis… - Journal of Micromechanics …, 2009 - iopscience.iop.org
We present modeling, analysis and experimental investigation for nonlinear resonances and
the dynamic pull-in instability in electrostatically actuated resonators. These phenomena are …

An experimental and theoretical investigation of dynamic pull-in in MEMS resonators actuated electrostatically

FM Alsaleem, MI Younis… - Journal of …, 2010 - ieeexplore.ieee.org
We present experimental and theoretical investigations of dynamic pull-in of electrostatically
actuated resonators. Several experimental data are presented, showing regimes of ac …

Nonlinear dynamics and its applications in micro-and nanoresonators

JF Rhoads, SW Shaw… - Dynamic systems …, 2008 - asmedigitalcollection.asme.org
This review provides a summary of the work completed to date on the nonlinear dynamics of
resonant micro-and nanoelectromechanical systems (MEMS/NEMS). This research area …

[PDF][PDF] Studies on Pull-in instability of an electrostatic MEMS actuator: dynamical system approach

X Liu, L Zhang, M Zhang - J. Appl. Anal. Comput, 2022 - jaac-online.com
The pull-in instability of an electrostatic microstructures is a common undesirable
phenomenon which implies the loss of reliability of microelectromechanical systems. It is …

Nonautonomous saddle-node bifurcation in a canonical electrostatic MEMS

A Gutiérrez, PJ Torres - International Journal of Bifurcation and …, 2013 - World Scientific
We study the existence and stability of periodic solutions of a canonical mass-spring model
of electrostatically actuated Micro-Electro-Mechanical System (MEMS) by means of classical …

On the stability of periodic solutions with defined sign in MEMS via lower and upper solutions

D Nuñez, O Perdomo, A Rivera - Nonlinear Analysis: Real World …, 2019 - Elsevier
This article considers the existence and linear stability of positive periodic solutions for the
Nathanson's model and the Comb-drive finger model of Micro-Electro-Mechanical-Systems …

A note on the periodic solutions to a relativistic Micro-Electro-Mechanical System

C Kong, X Yu - Applied Mathematics and Computation, 2024 - Elsevier
A recent result shows that there exists d 0> 0 such that an idealized mass-spring model of
electrostatically actuated relativistic Micro-Electro-Mechanical System (MEMS) has at least …

Bifurcation and dynamics of periodic solutions of MEMS model with squeeze film dam**

S Lu, X Yu, Z An - Nonlinear Analysis: Real World Applications, 2025 - Elsevier
In this paper, we study the oscillations of an idealized mass–spring model of micro-electro-
mechanical system (MEMS) with squeeze film dam**. The model consists of two parallel …