Analog-to-digital converters based on sigma-delta modulators (ΣAM) are a popular choice
for high resolution conversion from the analog to the digital domain. With relatively small …

In this work, the architecture, and measurements results of an ultra-low noise closed-loop
force feedback gyroscope, with superior bias instability, are presented. The MEMS is …

High performance inertial sensors based on Micro-Electro-Mechanical Systems (MEMS)
have been progressively replacing quartz accelerometers, mechanical gyroscopes (gyros) …

High-performance electro-static gyroscopes require expensive vacuum-packaging, to
maintain the high-Q of the MEMS, and may require high actuation voltages. Piezo sensors …

In this work, a fast and cost-efficient method, to evaluate MEMS gyroscope, in a closed-loop
sense-mode operation (force-feedback), is introduced. The solution proposed in this paper …

In this work, we propose a systematic and flexible method for designing the electronic filter of
electro-mechanical ΣΔ (EM-ΣΔ) feedbacks, widely used for the closed-loop operation of high …

This paper presents a tri-axis MEMS gyroscope design with novel tetra-pendulum proof
masses for X-, Y-axis and regular proof masses for Z-axis rate sensing, which are all …

Cette thèse est le résultat de quatre ans de travail au sein du laboratoire Ampère, à l'Ecole
Centrale de Lyon, et était inscrite dans le cadre du projet Next4MEMS. J'aimerais donc …

We have performed an experimental assessment of the impact of assembly materials on
MEMS gyro thermal behavior. Very significant differences are obtained depending on the …

This paper presents a multi-mode ASIC interface with self-tuned filter to support a wide
variety of MEMS gyroscope with various resonance frequencies and various output signal …