Accurate pattern transfer, coupled with stringent requirements for throughput and quality in
lithography systems, necessitates the wafer scanner to execute an aggressive motion with …

In this paper we formally describe the hybrid integrator-gain system (HIGS), which is a
nonlinear integrator designed to avoid the limitations typically associated with linear …

This paper presents a novel “Constant in gain Lead in phase”(CgLp) element using
nonlinear reset technique. PID is the industrial workhorse even to this day in high-tech …

Scaled graphs allow for graphical analysis of nonlinear systems, but are generally difficult to
compute. The aim of this paper is to develop a method for approximating the scaled graph of …

The ever-growing demands on speed and precision from the precision motion industry have
pushed control requirements to reach the limitations of linear control theory. Nonlinear …

Hybrid integrator–gain systems (HIGS) are nonlinear elements designed for overcoming
fundamental limitations of linear time-invariant integrators. This paper presents numerically …

In this paper, a framework for the combination of robust fractional-order CRONE control with
nonlinear reset is given for both first and second generation CRONE control. General design …

In this paper a hybrid low-pass filter is developed and subsequently embedded in a PID-
based control design. The hybrid element switches between gain and integrator mode …

This paper addresses the main goal of using reset control in precision motion control
systems, breaking of the well-known “Waterbed effect”. A new architecture for reset elements …

This article introduces a closed-loop frequency analysis tool for reset control systems. To
begin with sufficient conditions for the existence of the steady-state response for a closed …