60 years of DLC coatings: historical highlights and technical review of cathodic arc processes to synthesize various DLC types, and their evolution for industrial …
J Vetter - Surface and Coatings Technology, 2014 - Elsevier
Diamond-like carbon (DLC) films deposited by cathodic vacuum arc evaporation (CVAE)
have attracted worldwide interest from research groups and industry since the beginning of …
have attracted worldwide interest from research groups and industry since the beginning of …
Diamond-like amorphous carbon
J Robertson - Materials science and engineering: R: Reports, 2002 - Elsevier
Diamond-like carbon (DLC) is a metastable form of amorphous carbon with significant sp3
bonding. DLC is a semiconductor with a high mechanical hardness, chemical inertness, and …
bonding. DLC is a semiconductor with a high mechanical hardness, chemical inertness, and …
Characterization of amorphous and nanocrystalline carbon films
Amorphous and nanocrystalline carbon films possess special chemical and physical
properties such as high chemical inertness, diamond-like properties, and favorable …
properties such as high chemical inertness, diamond-like properties, and favorable …
[LIVRE][B] Cathodic arcs: from fractal spots to energetic condensation
A Anders - 2008 - Springer
Cathodic arcs are among the longest studied yet least understood objects in science.
Plasma-generating, tiny spots appear on the cathode; they are highly dynamic and hard to …
Plasma-generating, tiny spots appear on the cathode; they are highly dynamic and hard to …
Foundations of physical vapor deposition with plasma assistance
Physical vapor deposition (PVD) refers to the removal of atoms from a solid or a liquid by
physical means, followed by deposition of those atoms on a nearby surface to form a thin …
physical means, followed by deposition of those atoms on a nearby surface to form a thin …
[LIVRE][B] Handbook of plasma immersion ion implantation and deposition
A Anders - 2000 - researchgate.net
Ion implantation is used extensively in the semiconductor industry to introduce dopant atoms
into wafers to influence electrical performance. This is largely due to the highly reproducible …
into wafers to influence electrical performance. This is largely due to the highly reproducible …
Ion flux from vacuum arc cathode spots in the absence and presence of a magnetic field
A Anders, GY Yushkov - Journal of Applied Physics, 2002 - pubs.aip.org
Because plasma production at vacuum cathode spots is approximately proportional to the
arc current, arc current modulation can be used to generate ion current modulation that can …
arc current, arc current modulation can be used to generate ion current modulation that can …
Stress reduction and bond stability during thermal annealing of tetrahedral amorphous carbon
A comprehensive study of the stress release and structural changes caused by
postdeposition thermal annealing of tetrahedral amorphous carbon (ta-C) on Si has been …
postdeposition thermal annealing of tetrahedral amorphous carbon (ta-C) on Si has been …
[HTML][HTML] Multi-functional bioactive silver-and copper-doped diamond-like carbon coatings for medical implants
Diamond-like carbon (DLC) coatings doped with bioactive elements of silver (Ag) and
copper (Cu) have been receiving increasing attention in the last decade, particularly in the …
copper (Cu) have been receiving increasing attention in the last decade, particularly in the …
Diamond-like carbon for magnetic storage disks
AC Ferrari - Surface and Coatings Technology, 2004 - Elsevier
Diamond-like carbon films form a critical protective layer on magnetic hard disks and their
reading heads. The ultimate limit to storage density is the super-paramagnetic limit, where …
reading heads. The ultimate limit to storage density is the super-paramagnetic limit, where …