Effect of the C-bridge on UV properties of organosilicate films
DS Seregin, S Naumov, WY Chang, YH Wu, Y Wang… - Thin Solid Films, 2019 - Elsevier
Carbon-bridged organosilicate films deposited by using different precursors are studied by
both experimentally and theoretically. It is shown that carbon-bridged OSG films have higher …
both experimentally and theoretically. It is shown that carbon-bridged OSG films have higher …
Effect of the C-bridge length on the ultraviolet-resistance of oxycarbosilane low-k films
The ultra-violet (UV) and vacuum ultra-violet (VUV) resistance of bridging alkylene groups in
organosilica films has been investigated. Similar to the Si-CH 3 (methyl) bonds, the Si-CH 2 …
organosilica films has been investigated. Similar to the Si-CH 3 (methyl) bonds, the Si-CH 2 …