We present a method for the quantitative determination of the photon force (PF)—the force
generated by the radiation pressure of photons reflected from the surface. We propose an …

In the past two decades global warming was being caused by rising absorptions of
greenhouse gases (GHG) composed by human activities. Greenhouse gases catch heat in …

Two designs for a mass sensor based on polysilicon cantilevers for hybrid integration with
CMOS circuitry are introduced. The change of deposited mass on the cantilever is measured …

Engineers, scientists, and researchers utilize the simulation program COMSOL Multiphysics
to precisely simulate the real world and investigate a variety of physical phenomena in their …

In recent years MEMS based microresonant sensors have been given a lot of attention due
to their potential as a platform for the development of many novel physical, chemical, and …

Extended demands for superior control of the operating conditions of structures and
processes have been controlled according to the needs for enhanced means of measuring …

This dissertation presents the design, fabrication, and evaluation of the first monolithically
integrated MEMS resonant sensor system realized in the InP-InGaAs material family. The …

Microcantilever sensors have attracted marvelous consideration in recent years and
numerous chemical and biological detections have been performed. Monolithic integration …