Micromachined fluid inertial sensors are an important class of inertial sensors, which mainly
includes thermal accelerometers and fluid gyroscopes, which have now been developed …

Current sensor networks need to be improved and updated to satisfy new essential
requirements of the Internet of Things, where cutting-edge applications will appear. These …

Acquisition of vibration data using off-the-shelf equipment is a costly procedure, thus
constraining the research and development in develo** countries. In this research, micro …

In following paper we propose method of energetic description for active microcantilevers.
Microelectromechanical devices (MEMS), to which the microcantilevers belong, are …

We present a one-dimensional (1D) theoretical model for the design analysis of a micro
thermal convective accelerometer (MTCA). Systematical design analysis was conducted on …

Numerical and experimental results obtained for the steady-state flow in a thin vertical liquid
layer heated locally from below are discussed. Based on these results, two laminar regimes …

Thermal convective accelerometers are based on heat transfer in a fluid-filled cavity.
Working principle of these sensors is well known and first MEMS implementations were …

Accelerometers are among the legacy sensors impacted by the development of silicon
micromachining techniques. With pressure sensors, they were the first devices using this …

This paper presents detailed development of a heat conduction model adapted for
micromachined convective accelerometers. Fitting expressions obtained from FEM data are …

This paper presents convection behavior investigation of CMOS MEMS convective
accelerometers using both analytical and FEM techniques. In a first part, a newly developed …