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Study of ALD Grown Multilayers Exhibiting Vacancy Induced Conductivity for Electron Emitters
Thin oxide multilayers are prepared using low-temperature atomic layer deposition (ALD).
The tungsten samples are coated with a multilayer stacks of refractory oxides: Al₂O₃ …
The tungsten samples are coated with a multilayer stacks of refractory oxides: Al₂O₃ …