Study of ALD Grown Multilayers Exhibiting Vacancy Induced Conductivity for Electron Emitters

D Burda, M Allaham, A Knápek… - 2024 37th International …, 2024 - ieeexplore.ieee.org
Thin oxide multilayers are prepared using low-temperature atomic layer deposition (ALD).
The tungsten samples are coated with a multilayer stacks of refractory oxides: Al₂O₃ …