[HTML][HTML] Advances in piezoelectric thin films for acoustic biosensors, acoustofluidics and lab-on-chip applications
Recently, piezoelectric thin films including zinc oxide (ZnO) and aluminium nitride (AlN)
have found a broad range of lab-on-chip applications such as biosensing, particle/cell …
have found a broad range of lab-on-chip applications such as biosensing, particle/cell …
A High Q Value ScAlN/AlN-Based SAW Resonator for Load Sensing
This article presents a high quality factor () load sensor based on Sc 0.2 Al 0.8 N/aluminum
nitride (AlN)-on-silicon surface acoustic wave (SAW) resonator. Finite element method …
nitride (AlN)-on-silicon surface acoustic wave (SAW) resonator. Finite element method …
Gravimetric biosensor based on a 1.3 GHz AlN shear-mode solidly mounted resonator
M DeMiguel-Ramos, B Díaz-Durán… - Sensors and Actuators B …, 2017 - Elsevier
We investigate the performance of solidly mounted resonators based on Ir/tilted-AlN/Ir
piezoelectric stacks as biosensors. These films are deposited by varying the pressure, the …
piezoelectric stacks as biosensors. These films are deposited by varying the pressure, the …
Mechanical and optical properties of SiO2 thin films deposited on glass
The optical and mechanical properties of amorphous SiO 2 films deposited on soda-lime
silicate float glass by reactive RF magnetron sputtering at room temperature were …
silicate float glass by reactive RF magnetron sputtering at room temperature were …
Design and modelling of solidly mounted resonators for low-cost particle sensing
This work presents the design and fabrication of Solidly Mounted Resonator (SMR) devices
for the detection of particulate matter (PM2. 5 and PM10) in order to develop a smart low …
for the detection of particulate matter (PM2. 5 and PM10) in order to develop a smart low …
[PDF][PDF] Hybrid artificial neural networks and analytical model for prediction of optical constants and bandgap energy of 3D nanonetwork silicon structures
S Joshi, A Kiani - Opto-Electronic Advances, 2021 - researching.cn
The aim of this study is to develop a reliable method to determine optical constants for 3D-
nanonetwork Si thin films manufactured using a pulsed-laser ablation technique that can be …
nanonetwork Si thin films manufactured using a pulsed-laser ablation technique that can be …
High-acoustic-impedance tantalum oxide layers for insulating acoustic reflectors
This work describes the assessment of the acoustic properties of sputtered tantalum oxide
films intended for use as high-impedance films of acoustic reflectors for solidly mounted …
films intended for use as high-impedance films of acoustic reflectors for solidly mounted …
Low-thickness high-quality aluminum nitride films for super high frequency solidly mounted resonators
We investigate the sputter growth of very thin aluminum nitride (AlN) films on iridium
electrodes for electroacoustic devices operating in the super high frequency range. Superior …
electrodes for electroacoustic devices operating in the super high frequency range. Superior …
Room temperature sputtering of inclined c-axis ZnO for shear mode solidly mounted resonators
ZnO films with a c-axis significantly inclined away from the surface normal were grown by a
remote plasma sputtering technique at room temperature. The films were used to make …
remote plasma sputtering technique at room temperature. The films were used to make …
Optical properties of Si/SiO2 nano structured films induced by laser plasma ionization deposition
This research explores the optical properties of a large group of silicon/silica nanofibrous
thin films. A picosecond pulse laser was employed for indirect deposition of ablated silicon …
thin films. A picosecond pulse laser was employed for indirect deposition of ablated silicon …