ALD reactor for coating porous substrates
A system and method for improved atomic layer deposition. The system includes a top
showerhead plate, a substrate and a bottom showerhead plate. The substrate includes a …
showerhead plate, a substrate and a bottom showerhead plate. The substrate includes a …
Atomic layer deposition of fluoride thin films
A secondary electron emissive coating. The coating is formed by atomic layer deposition of
CaF 2 on a substrate by ALD half cycle exposure of an alkaline metal amidinate and ALD …
CaF 2 on a substrate by ALD half cycle exposure of an alkaline metal amidinate and ALD …
Method of making thin films of sodium fluorides and their derivatives by ALD
A method of making thin films of sodium fluorides and their derivatives by atomic layer
deposition (“ALD”). A sodium precursor is exposed to a substrate in an ALD reactor. The …
deposition (“ALD”). A sodium precursor is exposed to a substrate in an ALD reactor. The …
Barrier coatings
A secondary electron emissive layer resistant to infiltration and fouling. A barrier layer is
formed by atomic layer deposition. The barrier layer may be an emissive layer and/or an …
formed by atomic layer deposition. The barrier layer may be an emissive layer and/or an …