Advances in ultrashallow do** of silicon

C Zhang, S Chang, Y Dan - Advances in Physics: X, 2021 - Taylor & Francis
Ultrashallow do** is required for both classical field-effect transistors in integrated circuits
and revolutionary quantum devices in quantum computing. In this review, we give a brief …

[HTML][HTML] Polymeric precision do** as an emerging technology for the downscaling of microelectronic Devices: State of the art

R Chiarcos, M Laus, M Perego - European Polymer Journal, 2024 - Elsevier
The pressing trend towards downscaling of microelectronic devices constantly requires
updated technologies capable of precise control of dopant atom dose in semiconductive …

Fabrication of Porous Heteroatom‐Doped Carbon Networks via Polymer‐Assisted Rapid Thermal Annealing

JN Pagaduan, A Bhardwaj, TY McCarty… - Advanced Functional …, 2024 - Wiley Online Library
Porous carbon materials have increasingly drawn interest for applications ranging from
supercapacitive energy storage to bioengineering. However, a simple and scalable …

Reaction of BCl3 with H-and Cl-terminated Si (1 0 0) as a pathway for selective, monolayer do** through wet chemistry

D Silva-Quinones, C He, RE Butera, GT Wang… - Applied surface …, 2020 - Elsevier
The reaction of boron trichloride with the H-and Cl-terminated Si (1 0 0) surfaces was
investigated to understand the interaction of this molecule with the surface for designing wet …

Freeze-burn: fabrication of porous carbon networks via polymer-templated rapid thermal annealing

JN Pagaduan, S Samitsu, J Varma… - ACS Applied Polymer …, 2022 - ACS Publications
Porous materials continue to establish critically important roles in applications extending
from greenhouse gas capture to thermal superinsulation. Their effective structural control by …

Silicon do** by polymer grafting: size distribution matters

M Perego, S Kuschlan, G Seguini… - ACS Applied Polymer …, 2021 - ACS Publications
Phosphorus δ-layers in SiO2 have been prepared by means of poly (methyl
methacrylate)(PMMA), terminated with a phosphorus-containing moiety acting as an …

Do** of silicon by phosphorus end-terminated polymers: drive-in and activation of dopants

M Perego, F Caruso, G Seguini, E Arduca… - Journal of Materials …, 2020 - pubs.rsc.org
An effective do** technology for the precise control of P atom injection and activation into
a semiconductor substrate is presented. Polystyrene polymers with a narrow molecular …

Thermal degradation in ultrathin films outperforms dose control of n-type polymeric dopants for silicon

R Chiarcos, V Gianotti, M Cossi… - ACS Applied …, 2019 - ACS Publications
Polystyrene samples with different molar mass and narrow polydispersity index were
prepared by nitroxide-mediated polymerization using N-tert-butyl-N-[1-diethylphosphono (2 …

Defect Healing in Graphene via Rapid Thermal Annealing with Polymeric “Nanobandage”

C Senger, X Fan, JN Pagaduan, X Zhang, J **… - Small, 2023 - Wiley Online Library
Overcoming throughput challenges in current graphene defect healing processes, such as
conventional thermal annealing, is crucial for realizing post‐silicon device fabrication …

Mussel-inspired strategy for stabilizing ultrathin polymer films and its application to spin-on do** of semiconductors

R Katsumata, R Limary, Y Zhang, BC Popere… - Chemistry of …, 2018 - ACS Publications
Stabilizing ultrathin films, in particular avoiding dewetting, is critical to the application of
polymer thin films from biology to electronics. To address this issue, a wide range of …