Advances in ultrashallow do** of silicon
C Zhang, S Chang, Y Dan - Advances in Physics: X, 2021 - Taylor & Francis
Ultrashallow do** is required for both classical field-effect transistors in integrated circuits
and revolutionary quantum devices in quantum computing. In this review, we give a brief …
and revolutionary quantum devices in quantum computing. In this review, we give a brief …
[HTML][HTML] Polymeric precision do** as an emerging technology for the downscaling of microelectronic Devices: State of the art
The pressing trend towards downscaling of microelectronic devices constantly requires
updated technologies capable of precise control of dopant atom dose in semiconductive …
updated technologies capable of precise control of dopant atom dose in semiconductive …
Fabrication of Porous Heteroatom‐Doped Carbon Networks via Polymer‐Assisted Rapid Thermal Annealing
Porous carbon materials have increasingly drawn interest for applications ranging from
supercapacitive energy storage to bioengineering. However, a simple and scalable …
supercapacitive energy storage to bioengineering. However, a simple and scalable …
Reaction of BCl3 with H-and Cl-terminated Si (1 0 0) as a pathway for selective, monolayer do** through wet chemistry
The reaction of boron trichloride with the H-and Cl-terminated Si (1 0 0) surfaces was
investigated to understand the interaction of this molecule with the surface for designing wet …
investigated to understand the interaction of this molecule with the surface for designing wet …
Freeze-burn: fabrication of porous carbon networks via polymer-templated rapid thermal annealing
Porous materials continue to establish critically important roles in applications extending
from greenhouse gas capture to thermal superinsulation. Their effective structural control by …
from greenhouse gas capture to thermal superinsulation. Their effective structural control by …
Silicon do** by polymer grafting: size distribution matters
Phosphorus δ-layers in SiO2 have been prepared by means of poly (methyl
methacrylate)(PMMA), terminated with a phosphorus-containing moiety acting as an …
methacrylate)(PMMA), terminated with a phosphorus-containing moiety acting as an …
Do** of silicon by phosphorus end-terminated polymers: drive-in and activation of dopants
An effective do** technology for the precise control of P atom injection and activation into
a semiconductor substrate is presented. Polystyrene polymers with a narrow molecular …
a semiconductor substrate is presented. Polystyrene polymers with a narrow molecular …
Thermal degradation in ultrathin films outperforms dose control of n-type polymeric dopants for silicon
Polystyrene samples with different molar mass and narrow polydispersity index were
prepared by nitroxide-mediated polymerization using N-tert-butyl-N-[1-diethylphosphono (2 …
prepared by nitroxide-mediated polymerization using N-tert-butyl-N-[1-diethylphosphono (2 …
Defect Healing in Graphene via Rapid Thermal Annealing with Polymeric “Nanobandage”
C Senger, X Fan, JN Pagaduan, X Zhang, J **… - Small, 2023 - Wiley Online Library
Overcoming throughput challenges in current graphene defect healing processes, such as
conventional thermal annealing, is crucial for realizing post‐silicon device fabrication …
conventional thermal annealing, is crucial for realizing post‐silicon device fabrication …
Mussel-inspired strategy for stabilizing ultrathin polymer films and its application to spin-on do** of semiconductors
Stabilizing ultrathin films, in particular avoiding dewetting, is critical to the application of
polymer thin films from biology to electronics. To address this issue, a wide range of …
polymer thin films from biology to electronics. To address this issue, a wide range of …