Desire to integrate electronic devices more closely into the everyday life of the consumer led
to the emergence of flexible devices, which can conform to any shape surface. These …

This paper describes the modeling and design of two-color microbolometers for uncooled
infrared (IR) detection. The goal is to develop a high resolution IR detector array that can …

In this paper, the design, fabrication, and testing of a CMOS compatible mid-infrared (mid-IR)
thermopile sensor comprising a stacked double layer thermopile and an interferometric …

In this paper, we report on the first realization and characterization of monolithic uncooled
8/spl times/8 infrared sensor arrays, based on amorphous silicon thin-film transistors (a-Si …

We report measurements of the optical responses of a La 2∕ 3 Sr 1∕ 3 Mn O 3 (LSMO)
sample at a wavelength of 533 nm in the 300–400 K range. At 335 K the temperature …

A cantilever-based uncooled IR imager was developed utilizing a novel optical readout
scheme based on inter-pixel interference. A series of small arrays (approximately 100× 100 …

SiGe-based bolometers originally designed for infrared operation have been tested as
detectors of terahertz radiation. The obtained values of the responsivity and noise equivalent …

Microbolometers of a-Si 0.15 Ge 0.85 O. 0.236: H were fabricated by radio frequency (RF)
magnetron sputtering. A sandwich layer of silicon nitride-silicon germanium oxide-silicon …

This paper presents the design, fabrication, characterization, and noise reduction of
metasurface integrated uncooled infrared (IR) microbolometers. The metasurface allows the …

This paper reports on the design, fabrication, and characterization of device-level vacuum-
packaged microbolometers on rigid Si wafers and flexible polyimide substrates …