This review surveys micromachined gyroscope structure and circuitry technology. The
principle of micromachined gyroscopes is first introduced. Then, different kinds of MEMS …

High aspect-ratio etchings are a key aspect of the fabrication of III–V semiconductor devices.
The increasing demand for diverse geometries with various characteristic lengths (from the …

This disclosure relates to a microelectromechanical gyroscope comprising a substrate with
an inertial mass suspended from a suspension structure which allows the first inertial mass …

This disclosure reveals a resonator where at least one suspended inertial mass is driven
into rotational oscillation by a piezoelectric drive transducer, or where the rotational motion …

This paper proposes a solution for sensing spatial angular velocity. A high-performance
digital interface application specific integrated circuit (ASIC) for triple-axis micro …

This paper deals with the conception and realization of a 3 axis gyrometer in GaAs known as
CVG (Coriolis Vibrating Gyro), designed thanks to MEMS (Micro Electro Mechanical …

A novel structure of a double-H tuning fork for an angular rate sensor, which can detect two-
axial angular rates on a single quartz chip, is proposed in this article. Multiple sensing forks …

This paper deals with the design and fabrication of a 3-axis Coriolis Vibrating micro Gyro
(μCVG), based on a single planar monolithic structure. The presented μCVG design ensures …

This disclosure reveals a resonator where at least one suspended inertial mass is driven
into rotational oscillation by a piezoelectric drive transducer, or where the rotational motion …

The disclosure describes a microelectromechanical gyroscope comprising a substrate and
at least one inertial mass suspended from an anchor points by a suspension structure …