MEMS-based oscillators are an emerging class of highly miniaturized, batch manufacturable
timing devices that can rival the electrical performance of well-established quartz-based …

Over the past few years, microelectromechanical system (MEMS) based on-chip resonators
have shown significant potential for sensing and high frequency signal processing …

A new fabrication methodology that allows self-alignment of a micromechanical structure to
its anchor (s) has been used to achieve vibrating radial-contour mode polysilicon …

Series-resonant vibrating micromechanical resonator oscillators are demonstrated using a
custom-designed single-stage zero-phase-shift sustaining amplifier together with planar …

Wireless sensor nodes are autonomous devices incorporating sensing, power, computation,
and communication into one system. Applications for large scale networks of these nodes …

There is a growing interest in implementing on-chip reference clock generators for low-cost
low-power area-efficient SoCs, such as implantable biomedical devices and …

Micromechanical RF filters and reference oscillators based on recently demonstrated
vibrating on-chip micromechanical resonators with Qs> 10,000 at 1.5 GHz, are described as …

A monolithic and self-referenced radio frequency (RF) LC clock generator that is compliant
with USB 2.0 is demonstrated in a system-on-chip (SoC). This work presents the first …

Advances in microfabrication technology have enabled micromechanical systems (MEMS)
to become a core component in a manifold of applications. For many of these applications …

Microelectromechanical systems (MEMS) resonators typically exhibit large parasitic
feedthrough where the input drive signal is directly coupled to the output ports, presenting a …