Copper foam structures with highly porous nanostructured walls

HC Shin, M Liu - Chemistry of materials, 2004 - ACS Publications
A variety of copper foams with highly open porous walls have been successfully sculptured
using the gas evolved in an electrochemical deposition process. The pore sizes and wall …

Superconformal electrodeposition of copper in 500–90 nm features

TP Moffat, JE Bonevich, WH Huber… - Journal of The …, 2000 - iopscience.iop.org
The successful implementation of copper electroplating technology in the metallization of
electronic devices derives from the use of electrolyte additives to affect the local deposition …

Influence of convection-dependent adsorption of additives on microvia filling by copper electroplating

WP Dow, HS Huang, MY Yen… - Journal of The …, 2005 - iopscience.iop.org
Influences of forced convection during acid copper electroplating on microvia fill of printed
circuit boards were studied. The plating formula was composed of polyethylene glycol …

Curvature enhanced adsorbate coverage mechanism for bottom-up superfilling and bump control in damascene processing

TP Moffat, D Wheeler, SK Kim, D Josell - Electrochimica Acta, 2007 - Elsevier
Superconformal electrodeposition is explained by the curvature enhanced adsorbate
coverage (CEAC) mechanism. A CEAC model is used to quantitatively explain shape …

Microvia filling by copper electroplating using diazine black as a leveler

WP Dow, CC Li, YC Su, SP Shen, CC Huang, C Lee… - Electrochimica …, 2009 - Elsevier
An organic additive, Diazine Black (DB), was employed as a leveler for microvia filling using
copper electroplating. DB is a derivative of Janus Green B (JGB), which is a common leveler …

Electrochemical and fill studies of a multicomponent additive package for copper deposition

P Taephaisitphongse, Y Cao… - Journal of the …, 2001 - iopscience.iop.org
An acid-copper plating bath containing chloride ions, polyethylene glycol (PEG), bis (3-
sulfopropyl) disulfide (SPS), and Janus Green B (JGB) has been characterized by …

Filling mechanism in microvia metallization by copper electroplating

WP Dow, MY Yen, SZ Liao, YD Chiu, HC Huang - Electrochimica Acta, 2008 - Elsevier
This work explores the mechanism of microvia filling by copper electroplating using a printed
circuit board (PCB) with a specific pattern design. The microvias employed in this work had …

Roles of chloride ion in microvia filling by copper electrodeposition: I. studies using SEM and optical microscope

WP Dow, HS Huang - Journal of The Electrochemical Society, 2005 - iopscience.iop.org
Microvias with various diameters formed by laser ablation on a printed circuit board (PCB)
were used to investigate the filling mechanism of the microvia in copper electroplating. The …

Roles of chloride ion in microvia filling by copper electrodeposition: II. Studies using EPR and galvanostatic measurements

WP Dow, HS Huang, MY Yen… - Journal of The …, 2005 - iopscience.iop.org
The interactions among additives employed in acidic copper plating solution for microvia
filling are characterized by galvanostatic measurement (GM) and electron paramagnetic …

Copper bottom-up deposition by breakdown of PEG-Cl inhibition

M Hayase, M Taketani, K Aizawa… - … and Solid-State …, 2002 - iopscience.iop.org
Copper bottom-up deposition in 200 nm trenches by an acid-copper sulfate with only two
additives [poly (ethylene glycol)(PEG) and is achieved. The inhibiting effect of …