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An aluminum nitride-based dual-axis MEMS in-plane differential resonant accelerometer
A dual-axis in-plane resonant accelerometer based on aluminum nitride (AlN) has been
developed, fabricated, and characterized. The performance of the constituent resonators in …
developed, fabricated, and characterized. The performance of the constituent resonators in …
[HTML][HTML] Sensitivity and directivity analysis of piezoelectric ultrasonic cantilever-based mems hydrophone for underwater applications
In this paper, we report on the characterization of the sensitivity and the directionality of a
novel ultrasonic hydrophone fabricated by micro-electro-mechanical systems (MEMS) …
novel ultrasonic hydrophone fabricated by micro-electro-mechanical systems (MEMS) …
An aluminum nitride on silicon resonant MEMS accelerometer operating in ambient pressure
We present an Aluminum Nitride (AlN) on Silicon (Si) resonant MEMS accelerometer with a
calibrated differential sensitivity of 387 ppm/g measured in ambient conditions in air. This …
calibrated differential sensitivity of 387 ppm/g measured in ambient conditions in air. This …
A Bent-TBTF Resonant MEMS Accelerometer using Auxiliary Supporting Beams
C Tu, Y Pan, Z Wang, X Zhang - IEEE Electron Device Letters, 2024 - ieeexplore.ieee.org
This letter demonstrates a high-responsivity piezoelectric resonant MEMS accelerometer
using a bent-TBTF resonator. Different from the conventional bent-beam resonant …
using a bent-TBTF resonator. Different from the conventional bent-beam resonant …
Experimentally validated aluminum nitride based pressure, temperature and 3-axis acceleration sensors integrated on a single chip
F Goericke, K Mansukhani… - 2014 IEEE 27th …, 2014 - ieeexplore.ieee.org
This paper reports a unified fabrication process used to build multiple Aluminum Nitride
(AlN) based micro-electromechanical system (MEMS) sensors on a single chip. A fully …
(AlN) based micro-electromechanical system (MEMS) sensors on a single chip. A fully …
Resonant tuning fork strain gauge operating in air with decoupled piezoelectric transducers
We report a unique MEMS resonant force sensor design that provides both reduced
motional resistance and greatly enhanced strain gauge factor to target operation under …
motional resistance and greatly enhanced strain gauge factor to target operation under …
Design considerations to enhance the performances of thin circular piezoelectric energy harvester diaphragms in harsh liquid environments
Thin circular piezoelectric energy harvester diaphragms undergoing large deflection in a
harsh liquid environment are investigated in this paper. A material set combining AlN as …
harsh liquid environment are investigated in this paper. A material set combining AlN as …