Critical review of Ohmic and Schottky contacts to β-Ga2O3

LAM Lyle - Journal of Vacuum Science & Technology A, 2022 - pubs.aip.org
Over the last decade, beta-phase gallium oxide (β-Ga2O3) has developed an extensive
interest for applications such as high-power electronics. Due to its ultrawide bandgap of∼ …

A review of gallium oxide-based power Schottky barrier diodes

X Ji, C Lu, Z Yan, L Shan, X Yan, J Wang… - Journal of Physics D …, 2022 - iopscience.iop.org
Abstract Gallium oxide (Ga 2 O 3) is a representative of ultra-wide bandgap semiconductors,
with a band gap of about 4.9 eV. In addition to a large dielectric constant and excellent …

[HTML][HTML] β-Gallium oxide power electronics

AJ Green, J Speck, G ** of β-Ga2O3 by MOCVD
F Alema, G Seryogin, A Osinsky, A Osinsky - APL Materials, 2021 - pubs.aip.org
We report on the Ge do** of Ga 2 O 3 using metalorganic chemical vapor deposition
(MOCVD) epitaxy. The effects of the GeH 4/N 2 flow rate, substrate temperature, VI/III ratio …

A review of molecular-beam epitaxy of wide bandgap complex oxide semiconductors

W Nunn, TK Truttmann, B Jalan - Journal of materials research, 2021 - Springer
Much progress has been made in the area of wide bandgap semiconductors for applications
in electronics and optoelectronics such as displays, power electronics, and solar cells. New …

[HTML][HTML] Silicon-doped β-Ga2O3 films grown at 1 µm/h by suboxide molecular-beam epitaxy

K Azizie, FVE Hensling, CA Gorsak, Y Kim… - APL materials, 2023 - pubs.aip.org
We report the use of suboxide molecular-beam epitaxy (S-MBE) to grow β-Ga2O3 at a
growth rate of∼ 1 µm/h with control of the silicon do** concentration from 5× 1016 to 1019 …

Controlled Si do** of β-Ga2O3 by molecular beam epitaxy

JP McCandless, V Protasenko, BW Morell… - Applied Physics …, 2022 - pubs.aip.org
We report controlled silicon do** of Ga 2 O 3 grown in plasma-assisted molecular beam
epitaxy. Adding an endplate to the Si effusion cell enables the control of the mobile carrier …

[HTML][HTML] Atomic scale mechanism of β to γ phase transformation in gallium oxide

HL Huang, JM Johnson, C Chae, A Senckowski… - Applied Physics …, 2023 - pubs.aip.org
We report the detailed mechanism behind the β to γ phase transformation in Sn-doped and
Si-implanted Ga 2 O 3 that we determined based on the direct observation of the atomic …

[HTML][HTML] Suitability of binary oxides for molecular-beam epitaxy source materials: A comprehensive thermodynamic analysis

KM Adkison, SL Shang, BJ Bocklund, D Klimm… - APL Materials, 2020 - pubs.aip.org
We have conducted a comprehensive thermodynamic analysis of the volatility of 128 binary
oxides to evaluate their suitability as source materials for oxide molecular-beam epitaxy …