Hydrogenation of phosphorus-doped polycrystalline silicon films for passivating contact solar cells

TN Truong, D Yan, C Samundsett… - … applied materials & …, 2019 - ACS Publications
We characterize and discuss the impact of hydrogenation on the performance of phosphorus-
doped polycrystalline silicon (poly-Si) films for passivating contact solar cells. Combining …

Role of polysilicon in poly-Si/SiO x passivating contacts for high-efficiency silicon solar cells

HJ Park, S Bae, SJ Park, JY Hyun, CH Lee, D Choi… - RSC …, 2019 - pubs.rsc.org
In this study, we focused on understanding the roles of a polysilicon (poly-Si) layer in poly-
Si/SiOx/c-Si passivating contacts. Passivating contact formation conditions were varied by …

Influence of PECVD deposition temperature on phosphorus doped poly-silicon passivating contacts

W Chen, TN Truong, HT Nguyen, C Samundsett… - Solar Energy Materials …, 2020 - Elsevier
This paper describes the influence of plasma enhanced chemical vapor deposition (PECVD)
deposition temperature on heavily doped silicon based (doped-Si/SiO x) passivating …

Hydrogenation Mechanisms of Poly‐Si/SiOx Passivating Contacts by Different Cap** Layers

TN Truong, D Yan, W Chen, M Tebyetekerwa… - Solar …, 2020 - Wiley Online Library
Herein, posttreatment techniques of phosphorus‐doped poly‐Si/SiOx passivating contacts,
including forming gas annealing (FGA), atomic layer deposition (ALD) of hydrogenated …

Morphology, microstructure, and do** behaviour: A comparison between different deposition methods for poly‐Si/SiOx passivating contacts

TN Truong, D Yan, CPT Nguyen, T Kho… - Progress in …, 2021 - Wiley Online Library
Crystallographic structures, optoelectronic properties, and nanoscale surface morphologies
of ex situ phosphorus‐doped polycrystalline silicon (poly‐Si)/SiOx passivating contacts …

Passivation Improvement of Poly‐SiOx Based TOPCon Contacts by Thermal Annealing in a Water Vapor Atmosphere: Mechanism Exploration and Application …

J Zhou, G Wang, X Su, H Ren, Y Zeng… - Advanced Energy …, 2023 - Wiley Online Library
Post‐treatment techniques of tunnel oxide passivated contact (TOPCon) structure are
universally implemented via executing an additional hydrogenation process to optimize the …

Deposition pressure dependent structural and optoelectronic properties of ex-situ boron-doped poly-Si/SiOx passivating contacts based on sputtered silicon

TN Truong, D Yan, W Chen, W Wang, H Guthrey… - Solar Energy Materials …, 2020 - Elsevier
Among common methods to form polycrystalline silicon (poly-Si) films for passivating-contact
solar cells, physical vapor deposition, in particular sputtering, is the safest one as it does not …

Hydrogen-assisted defect engineering of doped poly-Si films for passivating contact solar cells

TN Truong, D Yan, C Samundsett, A Liu… - ACS Applied Energy …, 2019 - ACS Publications
Hydrogen-assisted defect engineering, via a hydrogenated silicon nitride (SiN x: H) cap**
layer, on doped polycrystalline silicon (poly-Si) passivating-contact structures, is explored …

Tunnel oxide passivating electron contacts for high‐efficiency n‐type silicon solar cells with amorphous silicon passivating hole contacts

HJ Park, Y Lee, SJ Park, S Bae, S Kim… - Progress in …, 2019 - Wiley Online Library
This study proposes a hybrid solar cell structure for a highly efficient silicon solar cell
obtained by combining two passivating contact structures, namely, a heterojunction and …

Firing stability of polysilicon passivating contacts: the role of hydrogen

D Kang, HC Sio, J Stuckelberger, D Yan… - 2021 IEEE 48th …, 2021 - ieeexplore.ieee.org
This work compares the firing response of n-type silicon wafers passivated by n-and p-type
polysilicon (polySi)/SiO x contacts, and assesses the changes in their properties using …