Electroosmotic flow controlled microfluidic devices

DR Moles - US Patent 6,406,605, 2002 - Google Patents
Electroosmotic flow (EOF) has been proposed as a means for moving Solutions within a
microfluidic device. In accor dance with the present invention, two valve constructions are …

Micromachined fluidic device and method for making same

HT Van Lintel, D Maillefer, S Gamper - US Patent 7,005,078, 2006 - Google Patents
(57) ABSTRACT The fluid-flow device (100) of the invention comprises a stack (30) covered
by a closure wafer (20), said stack (30) comprising a Support wafer (36), a layer of insulating …

Dual diaphragm, single chamber mesopump

WR Herb, JD Zook, C Cabuz - US Patent 6,179,586, 2001 - Google Patents
E. 4. SN'ai-------------------------22. phragms to cause diaphragm movement to a plurality of
5.17635 s 1/1993 Bonne et al.. 25173005 diaphragm positions to control flow of fluid …

Structures having a substrate with a cavity and having an integrated circuit bonded to a contact pad located in the cavity

PB Halahan - US Patent 6,787,916, 2004 - Google Patents
Semiconductor dies are bonded to contact pads formed in a substrate's cavity. Vias through
the substrate open into the cavity. Conductive lines passing through the vias connect the …

Microelectromechanical flexible membrane electrostatic valve device and related fabrication methods

SH Goodwin-Johansson, GE McGuire - US Patent 6,590,267, 2003 - Google Patents
3,772,537 3,796,976 4,317,611 4,516,091 4,554,519 4,581,624 4,598,585 4,662,746
4,692,727 4,710,732 4,736,202 4,747,670 4,789,803 4,794,370 4,826,131 4,857,757 …

Gating apparatus and method of manufacture

AH Slocum, JR White - US Patent 7,025,324, 2006 - Google Patents
The basic structure and operation of the gating apparatus embodiments herein disclosed
are novel improvements upon US Pat. No. 5,964,242. The novel structures, designs and …

Gas valve with electronic health monitoring

D Kucera, T McCarthy, G Young, DJ Kasprzyk… - US Patent …, 2017 - Google Patents
This disclosure relates generally to valves, and more par ticularly, to gas valve assemblies.
In one illustrative but non-limiting example, a valve assembly may include a valve body, a …

Microfabricated elastomeric valve and pump systems

MA Unger, HP Chou, TA Thorsen, A Scherer… - US Patent …, 2009 - Google Patents
(57) ABSTRACT A method of fabricating an elastomeric structure, comprising: forming a first
elastomeric layer on top of a first microma chined mold, the first micromachined mold having …

Method for manufacturing a structure comprising a substrate with a cavity and a semiconductor integrated circuit bonded to a contact pad located in the cavity

PB Halahan - US Patent 6,753,205, 2004 - Google Patents
US6753205B2 - Method for manufacturing a structure comprising a substrate with a cavity
and a semiconductor integrated circuit bonded to a contact pad located in the cavity …