MEMS Vibratory Gyroscopes provides a solid foundation in the theory and fundamental
operational principles of micromachined vibratory rate gyroscopes, and introduces structural …

In this paper, adaptive control is presented for a class of single-degree-of-freedom (1DOF)
electrostatic microactuator systems which can be actively driven bidirectionally. The control …

We derive expressions for the effect of mechanical thermal noise on a vibrational
microelectromechanical system gyroscope, including the angle of random walk, the noise …

In this article, we provide an overview of a selection of topics of current interest in nonlinear
dynamics and vibrations of mechanical systems. Specifically, we cover the traditional topics …

This paper presents adaptive add-on control algorithms for the conventional mode of
operation of MEMS z-axis gyroscopes. This scheme is realized by adding an outer loop to a …

This paper presents a new adaptive operation strategy that can identify and, in an adaptive
fashion, compensate for most fabrication defects and perturbations affecting the behavior of …

Two adaptive controllers for a vibrational MEMS gyroscope are described. Both controllers
tune the drive axis natural frequency to a preselected frequency, regulate the amplitude of …

The microelectromechanical systems (MEMS) are penetrating more and more into
measurement and control problems because of their small size, low cost, and low power …

We describe the principle of operation and experimental characterization of an integrated
micromechanical vibratory rate gyroscope based on resonant sensing of the Coriolis force …

Due to restrictive tolerancing in microfabrication, structural imperfections that reduce
performance of fabricated micro devices are typical. In microelectromechanical vibratory …