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[HTML][HTML] Parametrically amplified low-power MEMS capacitive humidity sensor
We present the design, fabrication, and response of a polymer-based Laterally Amplified
Chemo-Mechanical (LACM) humidity sensor based on mechanical leveraging and …
Chemo-Mechanical (LACM) humidity sensor based on mechanical leveraging and …
A Monolithically integrated multisensor platform
The integration of multiple sensors on a single substrate is reported in this paper. A test chip
was designed using the integration platform that implemented a capacitive inertial sensor, a …
was designed using the integration platform that implemented a capacitive inertial sensor, a …