Design of a disk resonator gyroscope with high mechanical sensitivity by optimizing the ring thickness distribution

D **ao, X Zhou, Q Li, Z Hou, X **… - Journal of …, 2016 - ieeexplore.ieee.org
In this paper, we present the mechanical sensitivity improvement of a disk resonator
gyroscope (DRG) by optimizing the thickness distribution of the nested rings. The …

Decreasing frequency splits of hemispherical resonators by chemical etching

Y Wang, Y Pan, T Qu, Y Jia, K Yang, H Luo - Sensors, 2018 - mdpi.com
The hemispherical resonator gyroscope (HRG) has attracted the interest of the world inertial
navigation community because of its exceptional performance, ultra-high reliability and its …

Trimming of imperfect hemispherical shell including point mass distributions

JH Kim, JH Kim - International Journal of Mechanical Sciences, 2017 - Elsevier
Generally, a hemispherical shell is well-known simple structure for application in
engineering fields such as Hemispherical Resonator Gyroscope (HRG), Energy Harvester …

[HTML][HTML] Low-Damage Trimming of Micro Hemispherical Resonators by Chemical Etching

Z Zhou, K Lu, Y Shi, X **, J Sun, D **ao, X Wu - Micromachines, 2024 - mdpi.com
To enhance the performance of micro-hemispherical gyroscopes, achieving low-damage
and high-surface-quality trimming is essential. This enables greater stability and reliability …

The High-Precision Balance Method For Hemispherical Resonator Based on Synchronous Trimming System

W Zhang, Y Zhang, H Gu, Z Lin, Q Wei… - IEEE Sensors …, 2023 - ieeexplore.ieee.org
Hemispherical resonator gyroscope (HRG) is a high-precision inertial sensor for the
measurement of rate and attitude angle, and the fused silica hemispherical resonator is the …

Localized eutectic trimming of polysilicon microhemispherical resonating gyroscopes

B Hamelin, V Tavassoli, F Ayazi - IEEE Sensors Journal, 2014 - ieeexplore.ieee.org
This paper describes a novel technique to permanently tune a frequency mismatch between
degenerate modes of a polysilicon microhemispherical resonating gyroscope (HRG) caused …

Dynamic response and frequency split predictions for cylindrical fused silica resonators

Y Luo, I Gebrel, M Bognash, Y Pan, F Liu… - IEEE Sensors …, 2019 - ieeexplore.ieee.org
An investigation into the dynamic response and frequency split behavior of a cylindrical
fused silica resonator is performed via simulations and experiments. For this purpose, a …

Micro-hemispherical resonators and methods of making the same

F Ayazi, P Shao, X Gao, V Tavassoli - US Patent 10,393,525, 2019 - Google Patents
Aspects of the present disclosure relate to microelectrome chanical systems (MEMS) and
methods for fabricating MEMS. In some embodiments, the system includes a reso nator and …

Effect of imperfections on fused silica shell resonators

A Darvishian, B Shiari, JY Cho… - ASME …, 2014 - asmedigitalcollection.asme.org
Axisymmetric shell resonators have been attractive candidates for high performance MEMS
vibratory gyroscopes because of their high quality factor, low sensitivity to environmental …

Gyroscope frequency tuning tabs on support spokes

R Perahia, DJ Kirby, LD Sorenson… - US Patent 10,422,641, 2019 - Google Patents
US10422641B1 - Gyroscope frequency tuning tabs on support spokes - Google Patents
US10422641B1 - Gyroscope frequency tuning tabs on support spokes - Google Patents …