Structural, optical, and mechanical properties of Al_2O_3, SiO_2, and HfO_2 materials
prepared by plasma-enhanced atomic layer deposition (PEALD) were investigated …

In this paper, the gas phase composition of hexamethyldisiloxane (HMDSO) microwave
plasma at 4× 10− 3 mbar and of the corresponding films were studied by FTIR spectroscopy …

Silicone-like coatings were prepared by plasma enhanced chemical vapor deposition on
steel substrates using a hexamethyldisiloxane–oxygen (80∶ 20) precursor mixture, in a …

A commercially available liquid polysiloxane polymer was emulsified via stirring in the
presence of water and surfactant. After curing, porous microbead/capsule thermosets were …

Surface quality of nanostructures has a significant influence on related device performance.
In this study, a large number of dangling bonds are detected on the silicon nanocrystal (Si …

The growth, chemical, structural, mechanical, and optical properties of oxide thin films
deposited by plasma enhanced atomic layer deposition (PEALD) are strongly influenced by …

Thin films deposited from Hexamethyledisiloxane (HMDSO)/O2 mixture excited in a radio-
frequency hollow cathode discharge system have been investigated for their structural …

The response of resistive-type sensors based on thin hexamethyldisiloxane layers to relative
humidity (RH) was evaluated. Humidity sensitive layers were plasma polymerized at low …

This study details the variation of the SiOxCyHz film properties deposited on 316L stainless
steel in a 13.56 MHz RF Plasma Enhanced Chemical Vapor Deposition (PECVD) reactor …

In this paper we report on the use of expanding thermal plasma technique for the deposition
of carbon-free silicon dioxide films by means of argon/hexamethyldisiloxane/oxygen …