Texture in thin film silicides and germanides: A review

B De Schutter, K De Keyser, C Lavoie… - Applied Physics …, 2016 - pubs.aip.org
Silicides and germanides are compounds consisting of a metal and silicon or germanium. In
the microelectronics industry, silicides are the material of choice for contacting silicon based …

Study on the high-strength and high-conductivity modification mechanisms of C7035 copper alloy induced by La and Sc do**

C Li, H Wei, M Peng, Z Li - Vacuum, 2024 - Elsevier
The effects of multi-element do** on mechanical and electrical properties of C7035
copper alloy were investigated by first principles calculation and experiment based on …

[HTML][HTML] The influence of alloying on the phase formation sequence of ultra-thin nickel silicide films and on the inheritance of texture

FA Geenen, E Solano, J Jordan-Sweet… - Journal of Applied …, 2018 - pubs.aip.org
The controlled formation of silicide materials is an ongoing challenge to facilitate the
electrical contact of Si-based transistors. Due to the ongoing miniaturisation of the transistor …

The application of NiCrPt alloy targets for magnetron sputter deposition: Characterization of targets and deposited thin films

K Tang, X Li, C Wang, Y Shen, Y Xu, M Wen - Thin Solid Films, 2024 - Elsevier
NiSi thin films are extensively used in advanced semiconductor devices due to their
desirable electrical properties. Recently, the incorporation of platinum (Pt) into NiSi thin …

Nanoscale effect on the formation of the amorphous Ni silicide by rapid thermal annealing from crystalline and pre-amorphized silicon

C Delwail, K Dabertrand, S Joblot, F Mazen… - Acta Materialia, 2024 - Elsevier
The Ni monosilicide alloyed with Pt is widely used as contact material in advanced
microelectronics devices and a good knowledge of silicide formation kinetics is required for …

Ni (Pt)-silicide contacts on CMOS devices: Impact of substrate nature and Pt concentration on the phase formation

F Panciera, K Hoummada, C Perrin… - Microelectronic …, 2014 - Elsevier
Ni silicides used as contacts in source/drain and gate of advanced CMOS devices were
analyzed by atom probe tomography (APT) at atomic scale. These measurements were …

Mechanisms of nodule formation on Ni-Pt targets during sputtering

Y Wang, Y Chao, S Li, C Ze, M Wen - Applied Surface Science, 2025 - Elsevier
Ni-Pt alloys are employed in the formation of Ni-Pt silicide to facilitate contact and
interconnection functions in semiconductor devices. However, the formation of nodules on …

Selection of the first Ni silicide phase by controlling the Pt incorporation in the intermixed layer

M El Kousseifi, K Hoummada, M Bertoglio… - Acta Materialia, 2016 - Elsevier
During the deposition of a Ni film on a Si substrate, an intermixed layer usually forms at the
Ni/Si interface. In this work, the influence of Pt incorporation in this intermixed layer on the …

Nucleation and lateral growth kinetics of the NiSi phase at the epitaxial θ-Ni2Si/Si interface

M El Kousseifi, K Hoummada, F Panciera, C Lavoie… - Acta Materialia, 2020 - Elsevier
The first stages of the growth of the NiSi phase at the expense of θ-Ni 2 Si have been
studied mainly by in-situ XRD measurements and atom probe tomography (APT) analysis. In …

Control of Large‐Scale Single‐Phase Ni Silicide Formation from Reactive Multilayers

YW Chang, KH Lam, C Chang, HR Chen… - Advanced …, 2022 - Wiley Online Library
The Ni/Si reactive multilayer (RML) is full of application potentials including reactive joining,
igniters, and power sources. Here, the Ni/Si RMLs with atomic ratios of Ni and Si (2: 1, 1: 1 …