Micro-Opto-Electro-Mechanical Systems (MOEMS) accelerometer is a new type of
accelerometer which combines the merits of optical measurement and Micro-Electro …

This paper presents design optimization, numerical modelling, fabrication and
characterization of a single-axis comb drive MEMS gap-changeable differential capacitive …

This paper introduces a novel resonator design for a high-frequency mode-matched pitch (or
roll) gyroscope featuring large excitation amplitude and high Coriolis coupling to address …

High-performance MEMS accelerometers usually use a pendulum structure with a larger
mass. Although the performance of the device is guaranteed, the manufacturing cost is high …

This paper reports on the implementation and characterization of wafer-level-packaged
accelerometer contact microphones having wide bandwidth (fres> 10 kHz) and low-noise (< …

We present a 4.4-MHz resonant accelerometer based on the electrostatic softening effect in
a bulk acoustic wave (BAW) resonator, fabricated using a metal-less AlN-HARPSS process …

This article reports the design, fabrication, application-specific integrated circuit (ASIC),
package, and characterization of a-axis accelerometer with double differential torsional …

This paper presents the implementation and characterization of a single proof-mass wide-
bandwidth pendulum accelerometer with fully-differential sensitivity in all three axes. The …

This paper reports, for the first time, on characterization of gyroscopic modes in solid epi-
poly disk resonators, showing Qs exceeding 1M at~ 3MHz with a maximum fQ of 4.2 e× 10 …

We report on a novel wafer-level-packaged accelerometer contact microphone to pick up
acoustic vibrations orthogonal to its contact surface without responding to airborne acoustic …