Atomic‐Layer‐Deposition‐Based 2D Transition Metal Chalcogenides: Synthesis, Modulation, and Applications

Y Kim, WJ Woo, D Kim, S Lee, S Chung… - Advanced …, 2021 - Wiley Online Library
Transition metal chalcogenides (TMCs) are a large family of 2D materials with different
properties, and are promising candidates for a wide range of applications such as …

Atomic layer deposition of 2D metal dichalcogenides for electronics, catalysis, energy storage, and beyond

M Mattinen, M Leskelä, M Ritala - Advanced Materials …, 2021 - Wiley Online Library
Abstract 2D transition metal dichalcogenides (TMDCs) are among the most exciting
materials of today. Their layered crystal structures result in unique and useful electronic …

Atomic layer deposition of two-dimensional layered materials: processes, growth mechanisms, and characteristics

J Cai, X Han, X Wang, X Meng - Matter, 2020 - cell.com
Since the discovery of graphene, there has been an ever-increasing interest in two-
dimensional (2D) layered materials with exceptional properties. To this end, a variety of …

A wafer-scale synthesis of monolayer MoS 2 and their field-effect transistors toward practical applications

Y Liu, F Gu - Nanoscale Advances, 2021 - pubs.rsc.org
Molybdenum disulfide (MoS2) has attracted considerable research interest as a promising
candidate for downscaling integrated electronics due to the special two-dimensional …

[HTML][HTML] Atomic layer deposition of optoelectronic materials

M Leskelä, M Mattinen, M Ritala - … of Vacuum Science & Technology B, 2019 - pubs.aip.org
Optoelectronic materials can source, detect, and control light wavelengths ranging from
gamma and x rays to ultraviolet, visible, and infrared regions. Optoelectronic devices are …

Two-Dimensional Crystal Grain Size Tuning in WS2 Atomic Layer Deposition: An Insight in the Nucleation Mechanism

B Groven, A Nalin Mehta, H Bender… - Chemistry of …, 2018 - ACS Publications
When two-dimensional (2D) group-VI transition metal dichalcogenides such as tungsten
disulfide (WS2) are grown by atomic layer deposition (ALD) for atomic growth control at low …

Influence of the choice of precursors on the synthesis of two-dimensional transition metal dichalcogenides

V Brune, M Grosch, R Weißing, F Hartl, M Frank… - Dalton …, 2021 - pubs.rsc.org
The interest in transition metal dichalcogenides (TMDCs; MEy/2; M= transition metal; E=
chalcogenide, y= valence of the metal) has grown exponentially across various science and …

Thermal Atomic Layer Etching of MoS2 Using MoF6 and H2O

J Soares, AU Mane, D Choudhury… - Chemistry of …, 2023 - ACS Publications
Two-dimensional (2D) layered materials offer unique properties that make them attractive for
continued scaling in electronic and optoelectronic device applications. Successful …

Low-Temperature Growth of 2D-MoS2 Thin Films by Plasma-Enhanced Atomic Layer Deposition Using a New Molybdenum Precursor and Applicability to Gas …

JH Choi, MJ Ha, DG Kim, JM Lee… - ACS Applied Nano …, 2023 - ACS Publications
Two-dimensional transition-metal dichalcogenides (2D TMDs) such as molybdenum
disulfide (MoS2) have received great attention for various applications. However, large …

Study on the Deposition Characteristics of Molybdenum Thin Films Deposited by the Thermal Atomic Layer Deposition Method Using MoO2Cl2 as a Precursor

BJ Lee, KB Lee, MH Cheon, DW Seo, JW Choi - Coatings, 2023 - mdpi.com
In this study, we conducted research on manufacturing molybdenum (Mo) thin films by a
thermal atomic layer deposition method using solid MoO2Cl2 as a precursor. Mo thin films …