Atomic‐Layer‐Deposition‐Based 2D Transition Metal Chalcogenides: Synthesis, Modulation, and Applications
Transition metal chalcogenides (TMCs) are a large family of 2D materials with different
properties, and are promising candidates for a wide range of applications such as …
properties, and are promising candidates for a wide range of applications such as …
Atomic layer deposition of 2D metal dichalcogenides for electronics, catalysis, energy storage, and beyond
Abstract 2D transition metal dichalcogenides (TMDCs) are among the most exciting
materials of today. Their layered crystal structures result in unique and useful electronic …
materials of today. Their layered crystal structures result in unique and useful electronic …
Atomic layer deposition of two-dimensional layered materials: processes, growth mechanisms, and characteristics
Since the discovery of graphene, there has been an ever-increasing interest in two-
dimensional (2D) layered materials with exceptional properties. To this end, a variety of …
dimensional (2D) layered materials with exceptional properties. To this end, a variety of …
A wafer-scale synthesis of monolayer MoS 2 and their field-effect transistors toward practical applications
Y Liu, F Gu - Nanoscale Advances, 2021 - pubs.rsc.org
Molybdenum disulfide (MoS2) has attracted considerable research interest as a promising
candidate for downscaling integrated electronics due to the special two-dimensional …
candidate for downscaling integrated electronics due to the special two-dimensional …
[HTML][HTML] Atomic layer deposition of optoelectronic materials
Optoelectronic materials can source, detect, and control light wavelengths ranging from
gamma and x rays to ultraviolet, visible, and infrared regions. Optoelectronic devices are …
gamma and x rays to ultraviolet, visible, and infrared regions. Optoelectronic devices are …
Two-Dimensional Crystal Grain Size Tuning in WS2 Atomic Layer Deposition: An Insight in the Nucleation Mechanism
When two-dimensional (2D) group-VI transition metal dichalcogenides such as tungsten
disulfide (WS2) are grown by atomic layer deposition (ALD) for atomic growth control at low …
disulfide (WS2) are grown by atomic layer deposition (ALD) for atomic growth control at low …
Influence of the choice of precursors on the synthesis of two-dimensional transition metal dichalcogenides
V Brune, M Grosch, R Weißing, F Hartl, M Frank… - Dalton …, 2021 - pubs.rsc.org
The interest in transition metal dichalcogenides (TMDCs; MEy/2; M= transition metal; E=
chalcogenide, y= valence of the metal) has grown exponentially across various science and …
chalcogenide, y= valence of the metal) has grown exponentially across various science and …
Thermal Atomic Layer Etching of MoS2 Using MoF6 and H2O
Two-dimensional (2D) layered materials offer unique properties that make them attractive for
continued scaling in electronic and optoelectronic device applications. Successful …
continued scaling in electronic and optoelectronic device applications. Successful …
Low-Temperature Growth of 2D-MoS2 Thin Films by Plasma-Enhanced Atomic Layer Deposition Using a New Molybdenum Precursor and Applicability to Gas …
JH Choi, MJ Ha, DG Kim, JM Lee… - ACS Applied Nano …, 2023 - ACS Publications
Two-dimensional transition-metal dichalcogenides (2D TMDs) such as molybdenum
disulfide (MoS2) have received great attention for various applications. However, large …
disulfide (MoS2) have received great attention for various applications. However, large …
Study on the Deposition Characteristics of Molybdenum Thin Films Deposited by the Thermal Atomic Layer Deposition Method Using MoO2Cl2 as a Precursor
BJ Lee, KB Lee, MH Cheon, DW Seo, JW Choi - Coatings, 2023 - mdpi.com
In this study, we conducted research on manufacturing molybdenum (Mo) thin films by a
thermal atomic layer deposition method using solid MoO2Cl2 as a precursor. Mo thin films …
thermal atomic layer deposition method using solid MoO2Cl2 as a precursor. Mo thin films …