Recent advances in design and preparation of micro diamond cutting tools

H Liu, Y Yan, J Cui, Y Geng, T Sun… - International Journal of …, 2024‏ - iopscience.iop.org
Micro diamond tools are indispensable for the efficient machining of microstructured
surfaces. The precision in tool manufacturing and cutting performance directly determines …

Recent developments in micromilling using focused ion beam technology

AA Tseng - Journal of micromechanics and microengineering, 2004‏ - iopscience.iop.org
The application of focused ion beam (FIB) technology in microfabrication has become
increasingly popular. Its use in microfabrication has advantages over contemporary …

Ion beam lithography and nanofabrication: a review

F Watt, AA Bettiol, JA Van Kan, EJ Teo… - International Journal of …, 2005‏ - World Scientific
To overcome the diffraction constraints of traditional optical lithography, the next generation
lithographies (NGLs) will utilize any one or more of EUV (extreme ultraviolet), X-ray, electron …

Developments in micro/nanoscale fabrication by focused ion beams

CS Kim, SH Ahn, DY Jang - Vacuum, 2012‏ - Elsevier
Focused ion beam (FIB) technology has become increasingly attractive for the fabrication of
micro/nano structures for the purpose of the demands in industry and research. In this paper …

Tool-based micro machining and applications in MEMS

FZ Fang, K Liu, TR Kurfess, GC Lim - MEMS/NEMS: Handbook …, 2006‏ - Springer
Advances in product miniaturization leads to size and weight reduction which can
substantially increase the convenience and value of many products [1, 2]. Micro-Electro …

Recent advances in micro-and nano-machining technologies

S Gao, H Huang - Frontiers of Mechanical Engineering, 2017‏ - Springer
Device miniaturization is an emerging advanced technology in the 21st century. The
miniaturization of devices in different fields requires production of micro-and nano-scale …

Micro tool design and fabrication: A review

SNB Oliaei, Y Karpat, JP Davim, A Perveen - Journal of Manufacturing …, 2018‏ - Elsevier
Mechanical micromachining is considered as a cost-effective and efficient fabrication
technique to produce three dimensional features and free-form surfaces from various …

Electrochemical micro/nano-machining: principles and practices

D Zhan, L Han, J Zhang, Q He, ZW Tian… - Chemical Society …, 2017‏ - pubs.rsc.org
Micro/nano-machining (MNM) is becoming the cutting-edge of high-tech manufacturing
because of the increasing industrial demand for supersmooth surfaces and functional three …

Micromanufacturing: a review—part I

VK Jain, A Sidpara… - Proceedings of the …, 2014‏ - journals.sagepub.com
Micromanufacturing processes are expanding in their length and breadth as long as the
related research and development (R&D) activities and applications are concerned …

[ספר][B] Applied scanning probe methods VIII: Scanning probe microscopy techniques

B Bhushan, H Fuchs, M Tomitori - 2007‏ - books.google.com
The success of the Springer Series Applied Scanning Probe Methods I–VII and the rapidly
expanding activities in scanning probe development and applications worldwide made it a …