Precision etching for multi-level AlGaAs waveguides
We present inductively-coupled-plasma, reactive-ion-etching (ICP-RIE) techniques with 2
orders of magnitude difference in etch rates, for the Al_xGa_1-xAs material system. These …
orders of magnitude difference in etch rates, for the Al_xGa_1-xAs material system. These …
[LIVRE][B] Vertical Integration of Optical Waveguides in the AlGaAs/GaAs Semiconductors
Z Liao - 2018 - search.proquest.com
The rapidly growing Internet services put a higher bandwidth requirement on datacenters. A
low-power and low-cost photonic integrated circuit (PIC), using wavelength division …
low-power and low-cost photonic integrated circuit (PIC), using wavelength division …