A review of silicon-based wafer bonding processes, an approach to realize the monolithic integration of Si-CMOS and III–V-on-Si wafers

S Bao, Y Wang, K Lina, L Zhang, B Wang… - Journal of …, 2021 - iopscience.iop.org
The heterogeneous integration of III–V devices with Si-CMOS on a common Si platform has
shown great promise in the new generations of electrical and optical systems for novel …

Ge0.95Sn0.05 Gate-All-Around p-Channel Metal-Oxide-Semiconductor Field-Effect Transistors with Sub-3 nm Nanowire Width

Y Kang, S Xu, K Han, EYJ Kong, Z Song, S Luo… - Nano …, 2021 - ACS Publications
We demonstrate Ge0. 95Sn0. 05 p-channel gate-all-around field-effect transistors (p-
GAAFETs) with sub-3 nm nanowire width (W NW) on a GeSn-on-insulator (GeSnOI) …

High-efficiency normal-incidence vertical pin photodetectors on a germanium-on-insulator platform

Y Lin, KH Lee, S Bao, X Guo, H Wang, J Michel… - Photonics …, 2017 - opg.optica.org
In this paper, normal incidence vertical pin photodetectors on a germanium-on-insulator
(GOI) platform were demonstrated. The vertical pin structure was realized by ion-implanting …

Vertical tunneling field-effect transistor with germanium source and T-shaped silicon channel for switching and biosensing applications: A simulation study

IC Cherik, S Mohammadi - IEEE Transactions on Electron …, 2022 - ieeexplore.ieee.org
In this article, we introduce a novel vertical tunneling transistor that uses two germanium
source regions and a T-shaped silicon channel and investigate its performance for low …

Impact of thermal annealing on Ge-on-Insulator substrate fabricated by wafer bonding

J Kang, X Yu, M Takenaka, S Takagi - Materials Science in Semiconductor …, 2016 - Elsevier
We propose the Ge CMOS photonics platform with Ge-on-Insulator (GOI) substrate on which
Ge mid-infrared photonic devices and Ge CMOS transistors can be monolithically integrated …

High-performance Ge Photodetectors on Silicon Photonics Platform for Optical Interconnect

T Yan, L Li, Y Zhang, J Hao, J Meng, N Shi - Sensors and Actuators A …, 2024 - Elsevier
With the rapid development of 5 G communications, artificial intelligence, the Internet of
Things and other fields, the increasing demand for data transmission in communication …

[HTML][HTML] Reduction of threading dislocation density in Ge/Si using a heavily As-doped Ge seed layer

KH Lee, S Bao, B Wang, C Wang, SF Yoon, J Michel… - AIP Advances, 2016 - pubs.aip.org
High quality germanium (Ge) epitaxial film is grown directly on silicon (001) substrate with 6
off-cut using a heavily arsenic (As) doped Ge seed layer. The growth steps consists of (i) …

Integration of GaAs, GaN, and Si-CMOS on a common 200 mm Si substrate through multilayer transfer process

KH Lee, S Bao, L Zhang, D Kohen… - Applied Physics …, 2016 - iopscience.iop.org
The integration of III–V semiconductors (eg, GaAs and GaN) and silicon-on-insulator (SOI)-
CMOS on a 200 mm Si substrate is demonstrated. The SOI-CMOS donor wafer is …

[HTML][HTML] Defects reduction of Ge epitaxial film in a germanium-on-insulator wafer by annealing in oxygen ambient

KH Lee, S Bao, GY Chong, YH Tan, EA Fitzgerald… - APL Materials, 2015 - pubs.aip.org
A method to remove the misfit dislocations and reduce the threading dislocations density
(TDD) in the germanium (Ge) epilayer growth on a silicon (Si) substrate is presented. The …

Germanium-tin (GeSn) P-channel fin field-effect transistor fabricated on a novel GeSn-on-insulator substrate

D Lei, KH Lee, YC Huang, W Wang… - … on Electron Devices, 2018 - ieeexplore.ieee.org
Germanium–tin (GeSn) p-channel fin field-effect transistor (p-FinFET) was realized on a
novel GeSn-on-insulator (GeSnOI) substrate. The high-quality GeSnOI substrate was formed …