Roadmap for focused ion beam technologies

K Höflich, G Hobler, FI Allen, T Wirtz, G Rius… - Applied Physics …, 2023 - pubs.aip.org
The focused ion beam (FIB) is a powerful tool for fabrication, modification, and
characterization of materials down to the nanoscale. Starting with the gallium FIB, which was …

Making waves: kinetic processes controlling surface evolution during low energy ion sputtering

WL Chan, E Chason - Journal of applied physics, 2007 - pubs.aip.org
When collimated beams of low energy ions are used to bombard materials, the surface often
develops a periodic pattern or “ripple” structure. Different types of patterns are observed to …

Nanostructuring surfaces by ion sputtering

U Valbusa, C Boragno… - Journal of Physics …, 2002 - iopscience.iop.org
Surface etching by ion sputtering can be used to pattern surfaces. Recent studies using the
high-spatial-resolution capability of the scanning tunnelling microscope revealed in fact that …

Diamond‐Based Supercapacitors with Ultrahigh Cyclic Stability Through Dual‐Phase MnO2‐Graphitic Transformation Induced by High‐Dose Mn‐Ion Implantation

S Deshmukh, S Kunuku, P Jakobczyk… - Advanced Functional …, 2024 - Wiley Online Library
While occasionally being able to charge and discharge more quickly than batteries, carbon‐
based electrochemical supercapacitors (SCs) are nevertheless limited by their simplicity of …

Ripple formation on silicon by medium energy ion bombardment

TK Chini, DP Datta… - Journal of Physics …, 2009 - iopscience.iop.org
The formation of a self-organized nanoscale ripple pattern after off-normally incident ion
bombardment on the surface of amorphous materials, or on semiconductors like silicon that …

Surface engineering with ion beams: from self-organized nanostructures to ultra-smooth surfaces

F Frost, B Ziberi, A Schindler, B Rauschenbach - Applied Physics A, 2008 - Springer
Low-energy ion-beam sputtering, ie the removal of atoms from a surface due to the impact of
energetic ions or atoms, is an inherent part of numerous surface processing techniques …

Unraveling atomic-level self-organization at the plasma-material interface

JP Allain, A Shetty - Journal of Physics D: Applied Physics, 2017 - iopscience.iop.org
The intrinsic dynamic interactions at the plasma-material interface and critical role of
irradiation-driven mechanisms at the atomic scale during exposure to energetic particles …

Fundamentals of focused ion beam nanostructural processing: Below, at, and above the surface

WJ MoberlyChan, DP Adams, MJ Aziz, G Hobler… - MRS bulletin, 2007 - cambridge.org
This article considers the fundamentals of what happens in a solid when it is impacted by a
medium-energy gallium ion. The study of the ion/sample interaction at the nanometer scale …

Focused ion beam milling of diamond: Effects of on yield, surface morphology and microstructure

DP Adams, MJ Vasile, TM Mayer… - Journal of Vacuum …, 2003 - pubs.aip.org
The effects of H 2 O vapor introduced during focused ion beam (FIB) milling of diamond
(100) are examined. In particular, we determine the yield, surface morphology, and …

The shape and ordering of self-organized nanostructures by ion sputtering

F Frost, B Ziberi, T Höche, B Rauschenbach - Nuclear Instruments and …, 2004 - Elsevier
The formation of periodic ripple structures on surfaces bombarded with ions at oblique (off-
normal) incidence is a well-known and intensely studied phenomenon. In contrast to these …