Inadequate spatial mesh resolution for simulation of the time‐dependent Ginzburg–Landau
equations is shown to give rise to spurious solutions. Phenomenological studies to examine …

The maximum principle is the most important property of solutions to diffusion equations.
Violation of the maximum principle by the applied discretization scheme is the cause for …

Purpose The purpose of this paper was the development of a model enabling precise
determination of phosphorus concentration profile in the emitter layer of a silicon solar cell …

Thermal processing is used in semiconductor manufacturing to anneal crystal damage
caused by implant and to electrically activate the impurities that were introduced to form …

We investigate numerical integration, preconditioning, iterative solution and multigrid
strategies for a class of réaction-diffusion systems used for modeling nonequilibrium …

Preconditioning strategies based on incomplete LU factorization using thresholding with
dual drop** (ILUT) are investigated for iterative solution of sparse linear systems arising in …

Abstract The Semiconductor Manufacturing domain is characterized by continual, rapid
change and a high degree of complexity. These characteristics reduce the effectiveness of …

At very high concentrations phosphorus diffusion in silicon exhibits marked nonlinearities.
The hierarchy of physical models that attempt to explain this anomalous diffusion are …

Focuses on the mathematics of process modeling. Comparison between device modeling;
Contributions to mathematicians interested in nonlinear diffusion, moving boundary …

We investigate numerical integration and iterative solution strategies for a class of reaction-
diffusion systems used for modeling nonequilibrium phosphorus diffusion in silicon. These …