This review collates around 100 papers that developed micro-electro-mechanical system
(MEMS) capacitive microphones. As far as we know, this is the first comprehensive archive …

This paper presents a fully integrated CMOS humidity sensor for a smart RFID sensor
platform. The sensing element is a CMOS-compatible capacitive humidity sensor, which …

Recent years have witnessed an improvement in the energy efficiency of capacitive sensor
interfaces by more than three orders of magnitude. This article reviews the architectural and …

This paper presents an energy-efficient capacitive-sensor interface with a period-modulated
output signal. This interface converts the sensor capacitance to a time interval, which can be …

A discrete-time audio ΔΣ modulator for a MEMS microphone with digital output is presented
that features a scalable signal bandwidth to also support ultrasonic frequencies for proximity …

A dual-slope capacitance-to-digital converter for pressure-sensing is presented and
demonstrated in a complete microsystem. The design uses base capacitance subtraction …

In precision mechatronic systems, such as wafer steppers, the position of critical mechanical
components must be dynamically stabilized with sub-nanometer precision. This can be …

An intelligent digital microfluidic processor for biomedical detection is presented. This
potential architecture solves lots of traditional development bottlenecks to implement the …

This paper presents a highly digital, 0-1 MASH capacitance-to-digital converter (CDC). The
CDC works by sampling a reference voltage on the sensing capacitor and then quantizing …

Over the last decade, MEMS microphones have become the leading solution for
implementing the audio module in most portable devices. One of the main drivers for the …