Ultrasmooth Ti/Al multilayer with a Ti seed layer for EUV applications
H Wang, W Zhang, A Zhou, C Tao, J Peng… - Optical Materials …, 2024 - opg.optica.org
Al-base multilayers have attracted much interest in the extreme ultraviolet (EUV) optics field,
but high roughness of this multilayer due to the Al film is still a big concern. Here, a strategy …
but high roughness of this multilayer due to the Al film is still a big concern. Here, a strategy …