This article provides an overview of various patterning methodologies, and it is organized
into three major sections: generation of patterns, replication of patterns, and three …

The ever-increasing demands for miniature integrated optics, mechanics, electronics, and
biofluidics have generated great interest in high-performance glass components featuring …

This book considers both the unique characteristics of biological samples and the
challenges of microscale engineering. Divided into three main sections, it first examines …

Lithography serves as a fundamental process in the realms of microfabrication and
nanotechnology, facilitating the transfer of intricate patterns onto a substrate, typically in the …

A fabrication process of precisely controlled three-dimensional (3D) microstructures using a
maskless gray-scale lithography is described. Multilayered ultraviolet (UV) exposure …

Fast tool servo diamond turning is conventionally a spiral path-based process widely used to
efficiently fabricate non-rotationally symmetric surfaces with ultra-fine accuracy. However …

The fabrication of three-dimensional (3D) microscale structures is critical for many
applications, including strong and lightweight material development, medical device …

The advantages and applications of chalcogenide glass (ChG) thin film photoresists for
grayscale lithography are demonstrated. It is shown that the ChG films can be used to make …

Nanostructured optical components, such as nanolenses, direct light at subwavelength
scales to enable, among others, high-resolution lithography, miniaturization of photonic …

Chalcogenide phase-change thin films are used in many fields, such as optical information
storage and solid-state memory. In this work, we present another application of …