MEMS technology for timing and frequency control

CTC Nguyen - IEEE transactions on ultrasonics, ferroelectrics …, 2007 - ieeexplore.ieee.org
An overview on the vise of microelectromechanical systems (MEMS) technologies for timing
and frequency control is presented. In particular, micromechanical RF filters and reference …

Piezoelectric aluminum nitride vibrating contour-mode MEMS resonators

G Piazza, PJ Stephanou… - Journal of …, 2006 - ieeexplore.ieee.org
This paper reports theoretical analysis and experimental results on a new class of
rectangular plate and ring-shaped contour-mode piezoelectric aluminum nitride radio …

Mechanically corner-coupled square microresonator array for reduced series motional resistance

MU Demirci, CTC Nguyen - Journal of Microelectromechanical …, 2006 - ieeexplore.ieee.org
Substantial reductions in vibrating micromechanical resonator series motional resistance R
x have been attained by mechanically coupling and exciting a parallel array of corner …

Micromechanical" hollow-disk" ring resonators

SS Li, YW Lin, Y **e, Z Ren… - 17th IEEE International …, 2004 - ieeexplore.ieee.org
A vibrating polysilicon micromechanical" hollow-disk" ring resonator obtained by removing
quadrants of material from a solid disk resonator, but purposely leaving intact beams of …

[BOOK][B] Low-power electronics design

C Piguet - 2018 - books.google.com
The power consumption of integrated circuits is one of the most problematic considerations
affecting the design of high-performance chips and portable devices. The study of power …

The resonant body transistor

D Weinstein, SA Bhave - Nano letters, 2010 - ACS Publications
This paper introduces the resonant body transistor (RBT), a silicon-based dielectrically
transduced nanoelectromechanical (NEM) resonator embedding a sense transistor directly …

[BOOK][B] Wireless Sensor Networks

B Otis, J Rabaey - 2007 - Springer
The ubiquity of wireless links in our everyday life is increasing dramatically. One example of
this is the emerging field of wireless sensor networks. This new field presents many …

Vibrating RF MEMS for next generation wireless applications

CTC Nguyen - Proceedings of the IEEE 2004 Custom …, 2004 - ieeexplore.ieee.org
Micromechanical RF filters and reference oscillators based on recently demonstrated
vibrating on-chip micromechanical resonators with Qs> 10,000 at 1.5 GHz, are described as …

1.52-GHz micromechanical extensional wine-glass mode ring resonators

Y **e, SS Li, YW Lin, Z Ren… - ieee transactions on …, 2008 - ieeexplore.ieee.org
Vibrating polysilicon micromechanical ring resonators, using a unique extensional wine-
glass-mode shape to achieve lower impedance than previous UHF resonators, have been …

An ultra-low power MEMS-based two-channel transceiver for wireless sensor networks

BP Otis, YH Chee, R Lu, NM Pletcher… - 2004 Symposium on …, 2004 - ieeexplore.ieee.org
This paper explores the design and implementation of a low-power two-channel transceiver
using micromachined resonators. Wireless sensor networks require transceivers that are …