Frequency symmetry of a cobweb-like disk resonator gyroscope (CDRG) has been
compared with a conventional ring-like disk resonant gyroscope (RDRG) in this letter to …

Traditional fabrication techniques are not suitable for the manufacturing of three-
dimensional micro-scale structures. In this work, we report on a modified self molding punch …

Silicon photonic integrated circuits and micro-electro-mechanical systems enable the design
of compact, high-performance micro-opto-electro-mechanical systems (MOEMS) …

Cavity optomechanics with picometer displacement measurement resolution has shown vital
applications in high-precision sensing areas. In this paper, an optomechanical micro …

The hemispherical resonator gyro (HRG) is a type of precision inertial sensor that has the
advantages of direct angle measurement and unlimited dynamic range. The overall …

A self‐aligned fabrication method is employed for microscale hemispherical shell resonator
with integrated diamond electrodes on a silicon (Si) substrate. The millimetre‐scale three …

In purpose of building highly symmetric hemispherical molds for 3D shell resonator
fabrication, the evolution of etch profile of< 111> silicon in HNA (HF/HNO 3/CH 3 COOH) …

This paper proposes a novel three-dimensional (3-D) micromachined birdbath shell
resonator (\upmu μ-BSR) fabricated from polycrystalline diamond on silicon substrate for …

Free and forced vibrations of a thin toroidal shell rotating along its principal axis of symmetry
are considered. The motivation is a general research effort to explore new architectures in …

A novel three-dimensional (3D) micro-manufacturing technology of a curved surface
diamond structure used for a micro birdbath resonator gyroscope (-BRG) with integrated …