Recent Advanced Ultra‐Wide Bandgap β‐Ga2O3 Material and Device Technologies

S Sun, C Wang, S Alghamdi, H Zhou… - Advanced Electronic …, 2025 - Wiley Online Library
Abstract Gallium oxide (Ga2O3) is an emerging ultra‐wide bandgap (UWBG) semiconductor
material that has gained significant attention in the field of high voltage and high frequency …

Tutorial: Metalorganic chemical vapor deposition of β-Ga2O3 thin films, alloys, and heterostructures

AFM Bhuiyan, Z Feng, L Meng, H Zhao - Journal of Applied Physics, 2023 - pubs.aip.org
β-phase gallium oxide (Ga 2 O 3) is an emerging ultrawide bandgap (UWBG) semiconductor
with a bandgap energy of∼ 4.8 eV and a predicted high critical electric field strength of∼ 8 …

[HTML][HTML] Enhancing the electron mobility in Si-doped (010) β-Ga2O3 films with low-temperature buffer layers

A Bhattacharyya, C Peterson, T Itoh, S Roy, J Cooke… - APL Materials, 2023 - pubs.aip.org
We demonstrate a new substrate cleaning and buffer growth scheme in β-Ga 2 O 3 epitaxial
thin films using metal–organic vapor phase epitaxy (MOVPE). For the channel structure, a …

[HTML][HTML] State of the art, trends, and opportunities for oxide epitaxy

FVE Hensling, W Braun, DY Kim, LN Majer, S Smink… - APL Materials, 2024 - pubs.aip.org
Oxides have attracted enormous attention for both application-driven and fundamental solid-
state research owing to their broad range of unusual and unique properties. Oxides play an …

[HTML][HTML] Growth of β-Ga2O3 and ϵ/κ-Ga2O3 on AlN (0001) by molecular-beam epitaxy

S Raghuvansy, JP McCandless, M Schowalter, A Karg… - APL Materials, 2023 - pubs.aip.org
Growth of β-Ga2O3 and ϵ/κ-Ga2O3 on AlN(0001) by molecular-beam epitaxy | APL Materials |
AIP Publishing Skip to Main Content Umbrella Alt Text Umbrella Alt Text Close Publishers AIP …

Investigation of Si incorporation in (010) β-Ga2O3 films grown by plasma-assisted MBE using diluted disilane as Si source and suboxide Ga2O precursor

Z Wen, X Zhai, C Lee, S Kosanovic, Y Kim… - Applied Physics …, 2024 - pubs.aip.org
Traditionally, elemental Ga and Si have been used to supply Ga and Si, respectively, in
molecular beam epitaxy (MBE) to grow Si-doped β-Ga 2 O 3. In this work, we investigated …

Transport and electronic structure properties of MBE grown Sn doped Ga2O3 homo-epitaxial films

S Kuang, Z Yang, Z Zhang, Z Sheng, S Wei… - Materials Today …, 2024 - Elsevier
In this work, we report the transport, defect state and electronic structure properties of
unintentionally doped (UID) and Sn doped β-Ga 2 O 3 homo-epitaxial thin films grown by …

[HTML][HTML] Silicon implantation and annealing in β-Ga2O3: Role of ambient, temperature, and time

KR Gann, N Pieczulewski, CA Gorsak… - Journal of Applied …, 2024 - pubs.aip.org
Optimizing thermal anneals of Si-implanted β-Ga 2 O 3 is critical for low resistance contacts
and selective area do**. We report the impact of annealing ambient, temperature, and …

2D Embedded Ultrawide Bandgap Devices for Extreme Environment Applications

M Labed, JY Moon, SI Kim, JH Park, JS Kim… - ACS …, 2024 - ACS Publications
Ultrawide bandgap semiconductors such as AlGaN, AlN, diamond, and β-Ga2O3 have
significantly enhanced the functionality of electronic and optoelectronic devices, particularly …

[HTML][HTML] Atomic-scale investigation of γ-Ga2O3 deposited on MgAl2O4 and its relationship with β-Ga2O3

J Tang, K Jiang, C Xu, MJ Cabral, K **ao, LM Porter… - APL Materials, 2024 - pubs.aip.org
Nominally phase-pure γ-Ga 2 O 3 was deposited on (100) MgAl 2 O 4 within a narrow
temperature window centered at∼ 470 C using metal-organic chemical vapor deposition …