Recent progress in neural probes using silicon MEMS technology

P Ruther, S Herwik, S Kisban, K Seidl… - IEEJ Transactions on …, 2010 - Wiley Online Library
Extracellular recordings from the brain are the basis for the fundamental understanding of
the complex interaction of electrical signals in neural information transfer. Going beyond …

Brain–computer interfaces: an overview of the hardware to record neural signals from the cortex

T Stieglitz, B Rubehn, C Henle, S Kisban… - Progress in brain …, 2009 - Elsevier
Brain–computer interfaces (BCIs) record neural signals from cortical origin with the objective
to control a user interface for communication purposes, a robotic artifact or artificial limb as …

Fabrication technology for silicon-based microprobe arrays used in acute and sub-chronic neural recording

S Herwik, S Kisban, AAA Aarts, K Seidl… - Journal of …, 2009 - iopscience.iop.org
This work presents a new fabrication technology for silicon-based neural probe devices and
their assembly into two-dimensional (2D) as well as three-dimensional (3D) microprobe …

CMOS-based high-density silicon microprobe arrays for electronic depth control in intracortical neural recording

K Seidl, S Herwik, T Torfs, HP Neves… - Journal of …, 2011 - ieeexplore.ieee.org
This paper reports on a novel high-density CMOS-based silicon microprobe array for
intracortical recording applications. In contrast to existing systems, CMOS multiplexing units …

Versatile, modular 3D microelectrode arrays for neuronal ensemble recordings: from design to fabrication, assembly, and functional validation in non-human primates

F Barz, A Livi, M Lanzilotto, M Maranesi… - Journal of neural …, 2017 - iopscience.iop.org
Objective. Application-specific designs of electrode arrays offer an improved effectiveness
for providing access to targeted brain regions in neuroscientific research and brain machine …

Manufacturing, assembling and packaging of miniaturized neural implants

T Stieglitz - Microsystem technologies, 2010 - Springer
Implantable medical devices to interface technical aids with muscles, peripheral nerves, and
the brain have been developed for many applications over the last decades. They have …

Ultrathin silicon chips of arbitrary shape by etching before grinding

S Herwik, O Paul, P Ruther - Journal of microelectromechanical …, 2011 - ieeexplore.ieee.org
A complementary-metal-oxide-semiconductor-compatible fabrication technique for ultrathin
silicon chips of arbitrary shape is reported. It combines deep reactive ion etching and wafer …

In-plane silicon probes for simultaneous neural recording and drug delivery

K Seidl, S Spieth, S Herwik, J Steigert… - Journal of …, 2010 - iopscience.iop.org
This paper reports on the design, fabrication and characterization of silicon-based
microprobes for simultaneous neural recording and drug delivery. The fabrication …

Two-dimensional multi-channel neural probes with electronic depth control

T Torfs, AAA Aarts, MA Erismis, J Aslam… - IEEE transactions on …, 2011 - ieeexplore.ieee.org
This paper presents multi-electrode arrays for in vivo neural recording applications
incorporating the principle of electronic depth control (EDC), ie, the electronic selection of …

CMOS-based high-density silicon microprobe arrays for electronic depth control in intracortical neural recording–characterization and application

K Seidl, M Schwaerzle, I Ulbert… - Journal of …, 2012 - ieeexplore.ieee.org
This paper reports on the characterization and intracortical recording performance of high-
density complementary-metal–oxide–semiconductor (CMOS)-based silicon microprobe …