III‐V/silicon photonics for on‐chip and intra‐chip optical interconnects

G Roelkens, L Liu, D Liang, R Jones… - Laser & Photonics …, 2010 - Wiley Online Library
In this paper III‐V on silicon‐on‐insulator (SOI) heterogeneous integration is reviewed for
the realization of near infrared light sources on a silicon waveguide platform, suitable for …

Ge-photodetectors for Si-based optoelectronic integration

J Wang, S Lee - Sensors, 2011 - mdpi.com
High speed photodetectors are a key building block, which allow a large wavelength range
of detection from 850 nm to telecommunication standards at optical fiber band passes of 1.3 …

Surface preparation prior to deposition on germanium

G Wilk - US Patent 7,202,166, 2007 - Google Patents
Methods are provided for treating germanium Surfaces in preparation for Subsequent
deposition, particularly gate dielectric deposition by atomic layer deposition (ALD). Prior to …

Deposition of silicon germanium on silicon-on-insulator structures and bulk substrates

M Bauer - US Patent 7,208,354, 2007 - Google Patents
Methods are provided for producing SiGe-on-insulator structures and for forming strain-
relaxed SiGe layers on silicon while minimizing defects. Amorphous SiGe layers are …

Ultra compact 45 GHz CMOS compatible Germanium waveguide photodiode with low dark current

CT DeRose, DC Trotter, WA Zortman, AL Starbuck… - Optics express, 2011 - opg.optica.org
We present a compact 1.3× 4 μm^ 2 Germanium waveguide photodiode, integrated in a
CMOS compatible silicon photonics process flow. This photodiode has a best-in-class 3 dB …

Strain-induced band gap shrinkage in Ge grown on Si substrate

Y Ishikawa, K Wada, DD Cannon, J Liu… - Applied Physics …, 2003 - pubs.aip.org
Band gap shrinkage induced by tensile strain is shown for Ge directly grown on Si substrate.
In Ge-on-Si pin diodes, photons having energy lower than the direct band gap of bulk Ge …

Silicon modulators and germanium photodetectors on SOI: monolithic integration, compatibility, and performance optimization

TY Liow, KW Ang, Q Fang, JF Song… - IEEE Journal of …, 2009 - ieeexplore.ieee.org
Si modulators and Ge photodetectors are monolithically integrated on Si-on-insulator. The
carrier-depletion-type Si modulators achieved high modulation efficiency and speed (V¿ L …

Surface Engineering in SnO2/Si for High-Performance Broadband Photodetectors

M Xu, Z Xu, Z Sun, W Chen, L Wang, Y Liu… - … Applied Materials & …, 2023 - ACS Publications
Silicon-based photodetectors are important optoelectronic devices in many fields. Many
investigations have been conducted to improve the performance of silicon-based …

[КНИГА][B] Silicon Heterostructure Handbook: Materials, Fabrication, Devices, Circuits and Applications of SiGe and Si Strained-Layer Epitaxy

JD Cressler, S Monfray, G Freeman, D Friedman… - 2018 - taylorfrancis.com
An extraordinary combination of material science, manufacturing processes, and innovative
thinking spurred the development of SiGe heterojunction devices that offer a wide array of …

Strain-induced enhancement of near-infrared absorption in Ge epitaxial layers grown on Si substrate

Y Ishikawa, K Wada, J Liu, DD Cannon… - Journal of applied …, 2005 - pubs.aip.org
Epitaxially grown Ge layers on Si substrate are shown to reveal an enhanced absorption of
near-infrared light, which is effective for the photodiode application in Si-based photonics …