Micro and nanoelectromechanical systems M/NEMS have been extensively investigated
and exploited in the past few decades for various applications and for probing fundamental …

This article reviews the investigation of the mode-localized microelectromechanical system
(MEMS) coupled resonant sensors. This class of a sensor features a new approach in the …

This work, for the first time, presents a platform for designing microelectromechanical system
(MEMS) capacitive transducers featuring multiple transduction gaps implemented by a …

We present an experimental and theoretical investigation of the static and dynamic behavior
of electrostatically coupled laterally actuated silicon microbeams. The coupled beam …

A novel complimentary metal-oxide-semiconductor-microelectormechanical systems (CMOS-
MEMS) composite ring resonator capable of a dual-mode operation has been proposed to …

We wish to illuminate the analogous link between microfluidic-based devices, and the
already established pairing of micromechanics and microelectronics to create a …

Amplifying the signal-to-noise ratio of resonant sensors is vital toward the effort to
miniaturize devices into the sub-micro and nano regimes. In this paper, we demonstrate …

We propose a novel filter coupling scheme, which combines the merits of mechanically and
electrically coupled methods to enable a well-defined narrow bandwidth and a decent …

The CMOS-MEMS mechanically coupled filters fabricated using a mature CMOS-MEMS
platform together with simple post-CMOS release processes are proposed in this work for …

Micro-electromechanical systems (MEMS) bandpass filters based on arrays of
electrostatically driven coupled beams have been demonstrated at MHz frequencies. High …