Cluster tools are automated robotic manufacturing systems containing multiple computer-
controlled process modules. They have been increasingly used for wafer fabrication. This …

Cyber physical system (CPS) enables companies to keep high traceability and controllability
in manufacturing for better quality and improved productivity. However, several challenges …

We address a robotic flow shop scheduling problem where two part types are processed on
each given set of dedicated machines. A single robot moving on a fixed rail transports one …

With the rapid advancement and widespread applications of information technology in the
manufacturing shop floor, a huge amount of real-time data is generated, providing a good …

Resource failures may happen in automated manufacturing systems (AMSs) because of
different reasons in the real world, making most existing deadlock control policies …

This work proposes a novel structure in Petri nets, namely data inhibitor arcs, and their
application to the optimal supervisory control of Petri nets. A data inhibitor arc is an arc from …

In semiconductor manufacturing, there are wafer fabrication processes with wafer revisiting.
Some of them must meet wafer residency time constraints. Taking atomic layer deposition …

The recent developments of technologies in Internet of Things (IoT) provide the opportunities
for smart manufacturing with real-time traceability, visibility, and interoperability in production …

This paper deals with deadlock problems in Petri nets by adding a set of recovery
transitions. Different from traditional deadlock control methods by deploying control places …

This work studies the scheduling problem of a single-arm multicluster tool with a linear
topology and process-bound bottleneck individual tool. The objective is to find a one-wafer …