This paper applied a radial basis function network (RBFN) in coherent Fourier scatterometry
(CFS) to reconstruct the linewidth of periodic line/space (L/S) patterns. The fast …

We present a prototype of a simple, low-cost setup for a fast scatterometric surface texture
measurements. We used a total integrated scatter method (TIS) with a semiconductor laser …

The inverse scattering solution of shape and/or material parameter reconstruction is often
posed as a problem in nonlinear minimization of an objective function with respect to N …

Fast and robust metrologies for retrieving large amount of accurate wafer data is the key to
meet the ever stricter semiconductor manufacturing process control such as critical …

Accurate and fast kernel-based proximity effect correction (PEC) models are indispensable
to full-chip proximity effect simulation and correction. The attempt to utilize optical …