The computer code system penelope (version 2014) performs Monte Carlo simulation of
coupled electron-photon transport in arbitrary materials for a wide energy range, from a few …

Monte Carlo softwares are widely used to understand the capabilities of electron
microscopes. To study more realistic applications with complex samples, 3D Monte Carlo …

The design of the scanning transmission electron microscope (STEM), as conceived
originally by Crewe and coworkers, enables the highly efficient and flexible collection of …

A description of a new NIST database for quantitative Auger‐electron and X‐ray
photoelectron spectroscopy (AES/XPS) is given: Simulation of Electron Spectra for Surface …

We give a survey of information needed for quantitative surface analyses by X-ray
photoelectron spectroscopy (XPS). We describe four terms (the inelastic mean free path, the …

We give an overview of four terms (the inelastic mean free path (IMFP), the effective
attenuation length (EAL), the mean escape depth (MED), and the information depth (ID)) that …

The demand for coherent scattering data for modeling electron transport in matter has
increased in recent years. While much effort has been devoted to the improvement of …

An analysis is presented for a simple, universal equation for the computation of attenuation
lengths (L) for any material, necessary for quantifying layer thicknesses in Auger electron …

The width and shape of 10 nm to 12 nm wide lithographically patterned SiO 2 lines were
measured in the scanning electron microscope by fitting the measured intensity vs. position …

We have determined electron inelastic mean free paths (IMFPs) in C (graphite), Si, Cr, Fe,
Cu, Zn, Ga, Mo, Ag, Ta, W, Pt and Au by elastic-peak electron spectroscopy (EPES) using Ni …