[HTML][HTML] Advances in piezoelectric thin films for acoustic biosensors, acoustofluidics and lab-on-chip applications

YQ Fu, JK Luo, NT Nguyen, AJ Walton… - Progress in Materials …, 2017 - Elsevier
Recently, piezoelectric thin films including zinc oxide (ZnO) and aluminium nitride (AlN)
have found a broad range of lab-on-chip applications such as biosensing, particle/cell …

Atomic layer deposition of ZnO: a review

T Tynell, M Karppinen - Semiconductor Science and Technology, 2014 - iopscience.iop.org
Due to the unique set of properties possessed by ZnO, thin films of ZnO have received more
and more interest in the last 20 years as a potential material for applications such as thin-film …

Controlling preferred orientation and electrical conductivity of zinc oxide thin films by post growth annealing treatment

J Kennedy, PP Murmu, J Leveneur, A Markwitz… - Applied Surface …, 2016 - Elsevier
We report the microstructural evolution of the preferred orientation and electrical conductivity
of zinc oxide (ZnO) thin films prepared by ion beam sputtering. Elastic recoil detection …

Aqueous inorganic inks for low-temperature fabrication of ZnO TFTs

ST Meyers, JT Anderson, CM Hung… - Journal of the …, 2008 - ACS Publications
A simple, low-cost, and nontoxic aqueous ink chemistry is described for digital printing of
ZnO films. Selective design through controlled precipitation, purification, and dissolution …

Optical properties of gallium-doped zinc oxide—a low-loss plasmonic material: first-principles theory and experiment

J Kim, GV Naik, AV Gavrilenko, K Dondapati… - Physical Review X, 2013 - APS
Searching for better materials for plasmonic and metamaterial applications is an inverse
design problem where theoretical studies are necessary. Using basic models of impurity …

Effect of substrate temperature on the structure and optical properties of ZnO thin films deposited by reactive rf magnetron sputtering

S Singh, RS Srinivasa, SS Major - Thin solid films, 2007 - Elsevier
Zinc Oxide films were deposited on quartz substrates by reactive rf magnetron sputtering of
zinc target. The effect of substrate temperature on the crystallinity and band edge …

Aluminum doped zinc oxide deposited by atomic layer deposition and its applications to micro/nano devices

N Van Toan, TTK Tuoi, N Inomata, M Toda, T Ono - Scientific reports, 2021 - nature.com
This work reports investigation on the deposition and evaluation of an aluminum-doped zinc
oxide (AZO) thin film and its novel applications to micro-and nano-devices. The AZO thin film …

Preparation of highly conducting Al-doped ZnO target by vacuum heat-treatment for thin film solar cell applications

M Asemi, M Ahmadi, M Ghanaatshoar - Ceramics International, 2018 - Elsevier
In thin film solar cell technologies, room temperature deposition of highly conductive Al-
doped ZnO thin films as transparent conductive oxide is one of the most important factors …

Atomic layer deposition of zinc oxide: diethyl zinc reactions and surface saturation from first-principles

T Weckman, K Laasonen - The Journal of Physical Chemistry C, 2016 - ACS Publications
Zinc oxide thin films grown via atomic layer deposition have been under intense research for
the past few years. Here, we present a comprehensive density functional theory study on the …

A revisit to atomic layer deposition of zinc oxide using diethylzinc and water as precursors

J Cai, Z Ma, U We**ya, M Zou, Y Liu, H Zhou… - Journal of Materials …, 2019 - Springer
Nanophase zinc oxide (ZnO) has been widely studied as an important multifunctional
material in many applications. Atomic layer deposition (ALD) is a unique thin-film synthesis …