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High-K materials and metal gates for CMOS applications
The scaling of complementary metal oxide semiconductor (CMOS) transistors has led to the
silicon dioxide layer used as a gate dielectric becoming so thin that the gate leakage current …
silicon dioxide layer used as a gate dielectric becoming so thin that the gate leakage current …
Band offsets, Schottky barrier heights, and their effects on electronic devices
J Robertson - Journal of Vacuum Science & Technology A, 2013 - pubs.aip.org
The authors review the band line-ups and band offsets between semiconductors, dielectrics,
and metals, including the theory, experimental data, and the chemical trends. Band offsets …
and metals, including the theory, experimental data, and the chemical trends. Band offsets …
Recent progress in ab initio simulations of hafnia-based gate stacks
The continuous size downscaling of complementary metal–oxide–semiconductor (CMOS)
transistors has led to the replacement of SiO 2 with a HfO 2-based high dielectric constant …
transistors has led to the replacement of SiO 2 with a HfO 2-based high dielectric constant …
Maximizing performance for higher K gate dielectrics
J Robertson - Journal of Applied Physics, 2008 - pubs.aip.org
Further scaling of complementary metal oxide semiconductor gate stacks will require gate
dielectrics with a higher dielectric constant (K) than HfO 2. We point out that this will require …
dielectrics with a higher dielectric constant (K) than HfO 2. We point out that this will require …
Atomic mechanism of electric dipole formed at high-K: SiO2 interface
L Lin, J Robertson - Journal of Applied Physics, 2011 - pubs.aip.org
The mechanism of flat-band voltage shifts in La-and Al-based, etc., oxide cap** layers in
high-K (dielectric constant) metal gate stacks is investigated by ab initio calculations on …
high-K (dielectric constant) metal gate stacks is investigated by ab initio calculations on …
Conductive oxide interfaces for field effect devices
L Kornblum - Advanced Materials Interfaces, 2019 - Wiley Online Library
The discovery of 2D conductivity at the interface of insulating oxides uncovered a trove of
rich correlated‐electron physics, whose origins are still being debated 15 years later. In …
rich correlated‐electron physics, whose origins are still being debated 15 years later. In …
Fully Transparent p‐MoTe2 2D Transistors Using Ultrathin MoOx/Pt Contact Media for Indium‐Tin‐Oxide Source/Drain
Since transition metal dichalcogenide (TMD) semiconductors are found as 2D van der
Waals materials with a discrete energy bandgap, many 2D‐like thin field effect transistors …
Waals materials with a discrete energy bandgap, many 2D‐like thin field effect transistors …
Passivation of oxygen vacancy states and suppression of Fermi pinning in HfO2 by La addition
We show that group III elements such as La, Y, Sc, and Al can passivate adjacent oxygen
vacancies in HfO 2 and ZrO 2 by shifting the vacancy gap state up into the conduction band …
vacancies in HfO 2 and ZrO 2 by shifting the vacancy gap state up into the conduction band …