High-K materials and metal gates for CMOS applications

J Robertson, RM Wallace - Materials Science and Engineering: R: Reports, 2015 - Elsevier
The scaling of complementary metal oxide semiconductor (CMOS) transistors has led to the
silicon dioxide layer used as a gate dielectric becoming so thin that the gate leakage current …

Band offsets, Schottky barrier heights, and their effects on electronic devices

J Robertson - Journal of Vacuum Science & Technology A, 2013 - pubs.aip.org
The authors review the band line-ups and band offsets between semiconductors, dielectrics,
and metals, including the theory, experimental data, and the chemical trends. Band offsets …

Recent progress in ab initio simulations of hafnia-based gate stacks

H Zhu, C Tang, LRC Fonseca, R Ramprasad - Journal of Materials …, 2012 - Springer
The continuous size downscaling of complementary metal–oxide–semiconductor (CMOS)
transistors has led to the replacement of SiO 2 with a HfO 2-based high dielectric constant …

Maximizing performance for higher K gate dielectrics

J Robertson - Journal of Applied Physics, 2008 - pubs.aip.org
Further scaling of complementary metal oxide semiconductor gate stacks will require gate
dielectrics with a higher dielectric constant (K) than HfO 2⁠. We point out that this will require …

Atomic mechanism of electric dipole formed at high-K: SiO2 interface

L Lin, J Robertson - Journal of Applied Physics, 2011 - pubs.aip.org
The mechanism of flat-band voltage shifts in La-and Al-based, etc., oxide cap** layers in
high-K (dielectric constant) metal gate stacks is investigated by ab initio calculations on …

Conductive oxide interfaces for field effect devices

L Kornblum - Advanced Materials Interfaces, 2019 - Wiley Online Library
The discovery of 2D conductivity at the interface of insulating oxides uncovered a trove of
rich correlated‐electron physics, whose origins are still being debated 15 years later. In …

Fully Transparent p‐MoTe2 2D Transistors Using Ultrathin MoOx/Pt Contact Media for Indium‐Tin‐Oxide Source/Drain

Y Cho, JH Park, M Kim, Y Jeong, J Ahn… - Advanced Functional …, 2018 - Wiley Online Library
Since transition metal dichalcogenide (TMD) semiconductors are found as 2D van der
Waals materials with a discrete energy bandgap, many 2D‐like thin field effect transistors …

Passivation of oxygen vacancy states and suppression of Fermi pinning in HfO2 by La addition

D Liu, J Robertson - Applied Physics Letters, 2009 - pubs.aip.org
We show that group III elements such as La, Y, Sc, and Al can passivate adjacent oxygen
vacancies in HfO 2 and ZrO 2 by shifting the vacancy gap state up into the conduction band …