Abstract Effect of Si and Be barrier layers on the intermixing of thin Cr and Sc layers, as-
deposited and after annealing in a wide range of temperatures was considered using X-ray …

The effect of nitridation of Cr, Sc or both layers in the ultrathin multilayer structure Sc/Cr on
the intermixing of thin Cr and Sc layers, as-deposited and after annealing at different …

Time-resolved imaging allows revealing the interaction mechanisms in the microcosm of
both inorganic and biological objects. While X-ray microscopy has proven its advantages for …

Accurate extreme ultraviolet spectra of open N-shell neodymium (Nd) ions were recorded at
the electron beam ion trap facility of the National Institute of Standards and Technology. The …

We have systematically observed extreme ultraviolet (EUV) spectra from highly charged ions
of nine lanthanide elements with atomic numbers from 60–70 in optically thin plasmas …

The gadolinium (Gd) plasma is a potential beyond-EUV (BEUV) source for the extension of
extreme ultraviolet lithography at 13.5 nm. A laser induced discharge plasma (LDP) is an …

Gadolinium is a compelling candidate for the next-generation 6. x nanolithography light
source. We present a systematically study on the spectral purity at 6.7 nm in the gadolinium …

In this study, we demonstrate the laser intensity scaling of electron temperature in Gd laser-
produced plasmas (LPPs) through experiment and simulation. The spatial and temporal …

The double stream gas puff-based laser-produced plasma is studied as a source of soft X-
ray radiation in nm wavelength spectral range. Dynamics of plasma induced by Nd: YAG …

The use of laser produced plasmas (LPPs) in extreme ultraviolet/soft x-ray lithography and
metrology at 13.5 nm has been widely reported and recent research efforts have focused on …