Microfluidics is an emerging field that has given rise to a large number of scientific and
technological developments over the last few years. This review reports on the use of …

As the size of electronic and mechanical devices shrinks to the nanometre regime,
performance begins to be dominated by surface forces. For example, friction, wear and …

Manufacturing processes that can create extremely small machines have been developed in
recent years. Microelectromechanical systems (MEMS) refer to devices that have …

Micromachining and micro-electromechanical system (MEMS) technologies can be used to
produce complex structures, devices and systems on the scale of micrometers. Initially …

Surface micromachining is characterized by the fabrication of micromechanical structures
from deposited thin films. Originally employed for integrated circuits, films composed of …

This second edition of Handbook of Micro/Nanotribology addresses the rapid evolution
within this field, serving as a reference for the novice and the expert alike. Two parts divide …

The second edition of this standard-setting handbook provides and all-encompassing
reference for the practicing engineer in industry, government, and academia, with relevant …

There is great demand for micro-or miniaturized actuators for practical application. However,
magnetic coils of electromagnetic motors are an obstacle to such miniaturization because of …

The realm of ultra precision mechanisms, for example in controlling motion to small fractions
of a micrometer, is encroaching into many fields of technology. This book aims to provide a …

Microelectromechanical systems (MEMS) devices are made of doped single-crystal silicon,
LPCVD polysilicon films, and other ceramic films. Very little is understood about tribology …