Frequency unlocking-based MEMS bifurcation sensors

Y Qiao, Z Shi, Y Xu, X Wei, A Elhady… - Microsystems & …, 2023‏ - nature.com
MEMS resonators exhibit rich dynamic behaviors under the internal resonance regime. In
this work, we present a novel MEMS bifurcation sensor that exploits frequency unlocking …

[HTML][HTML] A Review on Resonant MEMS Electric Field Sensors

G Wang, P Yang, Z Chu, L Ran, J Li, B Zhang, X Wen - Micromachines, 2024‏ - mdpi.com
Electric field sensors (EFSs) are widely used in various fields, particularly in accurately
assessing atmospheric electric fields and high-voltage power lines. Precisely detecting …

A novel design of a MEMS resonant accelerometer with adjustable sensitivity

Y Zhang, S Wang, Q Yang, Y Qi, M Zhao… - Sensors and Actuators A …, 2024‏ - Elsevier
Highlights•Designed a MEMS accelerometer with adaptive sensitivity improves
versatility.•Validated tuning module efficacy via open-loop, closed-loop, and dynamic …

Coherent phonon manipulation using single-mode circular electrostatic resonator

H Chen, D Chen, R Huan, Y Fu, J **e - Sensors and Actuators A: Physical, 2023‏ - Elsevier
Coherent phonon manipulation is the mechanical analogy to photonic frequency combs
while there is lack of a comprehensive evaluation system on the performance. In this paper …

Frequency Comb With High Tunability via Coexistence State Excitation and Cavity Modulation in Microelectromechanical Resonators

H Chen, D Chen, R Huan, J **e - IEEE Sensors Journal, 2024‏ - ieeexplore.ieee.org
The modulation of phononic frequency comb (PFC), as a ruler of frequency, is complex and
flexible via different pump methods and microelectromechanical systems (MEMS) devices …

A Frequency Comb with High Resolution and Low Threshold Power Based on a Single Mode Circular Resonator

H Chen, D Chen, R Huan, J **e - 2023 22nd International …, 2023‏ - ieeexplore.ieee.org
This paper reports an intra-mode-coupling phononic frequency comb (PFC) based on a
single-mode circular electrostatic resonator. Compared with the performance of related …