Creating pure nanostructures from electron-beam-induced deposition using purification techniques: a technology perspective

A Botman, JJL Mulders, CW Hagen - Nanotechnology, 2009 - iopscience.iop.org
The creation of functional nanostructures by electron-beam-induced deposition (EBID) is
becoming more widespread. The benefits of the technology include fast'point-and …

Gas-assisted focused electron beam and ion beam processing and fabrication

I Utke, P Hoffmann, J Melngailis - … of Vacuum Science & Technology B …, 2008 - pubs.aip.org
Beams of electrons and ions are now fairly routinely focused to dimensions in the nanometer
range. Since the beams can be used to locally alter material at the point where they are …

High‐Resolution Patterning of Organic–Inorganic Photoresins for Tungsten and Tungsten Carbide Microstructures

M Luitz, D Pellegrini, M von Holst… - Advanced …, 2023 - Wiley Online Library
Tungsten is an important material for high‐temperature applications due to its high chemical
and thermal stability. Its carbide, that is, tungsten carbide, is used in tool manufacturing …

Highly conducting patterned Pd nanowires by direct-write electron beam lithography

T Bhuvana, GU Kulkarni - ACS nano, 2008 - ACS Publications
Palladium hexadecylthiolate is shown to serve as a negative-tone direct-write electron resist
to produce nanopatterns down to 30 nm. The written patterns do not deviate much from the …

Highly sensitive hydrogen sensor based on suspended, functionalized single tungsten nanowire bridge

J Choi, J Kim - Sensors and Actuators B: Chemical, 2009 - Elsevier
A highly sensitive hydrogen sensor based on suspended and functionalized single tungsten
nanowire is presented. The sensing tungsten nanowire is synthesized by focused ion beam …

Low temperature electrical characterisation of tungsten nano-wires fabricated by electron and ion beam induced chemical vapour deposition

IJ Luxmoore, IM Ross, AG Cullis, PW Fry, J Orr… - Thin Solid Films, 2007 - Elsevier
In this study we have fabricated tungsten containing nano-wires using focused electron and
ion beams from a tungsten hexacarbonyl precursor. The temperature dependent conductive …

Enhanced by-product desorption via laser assisted electron beam induced deposition of W (CO) 6 with improved conductivity and resolution

NA Roberts, CM Gonzalez, JD Fowlkes… - Nanotechnology, 2013 - iopscience.iop.org
Nanowires with higher tungsten (W) concentration and enhanced conductivity were grown
via the laser assisted electron beam induced deposition (LAEBID) technique using tungsten …

[HTML][HTML] Characterization and simulation of sputtering etched profile by focused gallium ion beam on GaN substrate

X Lin, C Fang, H Liu, G Wu, Y **ng - Materials & Design, 2022 - Elsevier
With the continuous development of manufacturing technology of micro/nano devices based
on GaN, focused gallium ion beam has become a momentous method for machining …

Chip editor: leveraging circuit edit for logic obfuscation and trusted fabrication

B Shakya, N Asadizanjani, D Forte… - 2016 IEEE/ACM …, 2016 - ieeexplore.ieee.org
The globalization of the semiconductor foundry business poses grave risks in terms of
intellectual property (IP) protection, especially for critical applications. Over the past few …

Low-current focused-ion-beam induced deposition of three-dimensional tungsten nanoscale conductors

W Li, PA Warburton - Nanotechnology, 2007 - iopscience.iop.org
We have used focused-ion-beam assisted chemical vapour deposition to
grow'flying'tungsten nanorods—ie nanoscale wiring which is not lying on the substrate …